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Graphite clamping piece and preparation method thereof
The invention discloses a graphite clamping piece. According to the graphite clamping piece, a ceramic material is sprayed to the exposed part of the outer side after a graphite base is connected witha graphite cap, exposed graphite is wrapped, the exposed area is reduced, contact with reaction materials in a furnace is isolated as much as possible, and therefore the carbon content is reduced, and the quality of polycrystalline silicon is improved. The graphite clamping piece comprises graphite clamping petals, a graphite cap and a graphite base, wherein the graphite clamping petals are arranged on the axis of the graphite base, the graphite cap penetrates through the graphite clamping petals to be installed on the graphite base, a silicon core penetrates through a cavity defined by the graphite clamping petals, the silicon core is fixed to the graphite base through connecting threads of the graphite cap and the graphite base, and the assembled graphite base, the outer wall of the graphite cap and an electrode installed on the graphite base are all coated with spraying layers made of a ceramic material. The invention further provides a preparation method of the graphite clamping piece.
本发明公开了一种石墨卡件,该石墨卡件通过在石墨座与石墨帽连接后的外侧裸露部分喷涂陶瓷材料,将裸露的石墨包裹起来,减少裸露面积,尽可能隔绝与炉子内部反应物料的接触,从而减少碳含量,提高多晶硅品质。所述石墨卡件包括石墨卡瓣、石墨帽和石墨底座;其中,石墨底座轴心上设有石墨卡瓣,石墨帽穿过石墨卡瓣安装在石墨底座上,硅芯穿过由石墨卡瓣围成的空腔,硅芯通过石墨帽与石墨底座的连接螺纹固定在石墨底座上,所述组装好后的石墨底座与石墨帽外壁上、安装在所述石墨底座上的电极皆喷涂有陶瓷材质的喷涂层。本发明还提供了上述石墨卡件的制备方法。
Graphite clamping piece and preparation method thereof
The invention discloses a graphite clamping piece. According to the graphite clamping piece, a ceramic material is sprayed to the exposed part of the outer side after a graphite base is connected witha graphite cap, exposed graphite is wrapped, the exposed area is reduced, contact with reaction materials in a furnace is isolated as much as possible, and therefore the carbon content is reduced, and the quality of polycrystalline silicon is improved. The graphite clamping piece comprises graphite clamping petals, a graphite cap and a graphite base, wherein the graphite clamping petals are arranged on the axis of the graphite base, the graphite cap penetrates through the graphite clamping petals to be installed on the graphite base, a silicon core penetrates through a cavity defined by the graphite clamping petals, the silicon core is fixed to the graphite base through connecting threads of the graphite cap and the graphite base, and the assembled graphite base, the outer wall of the graphite cap and an electrode installed on the graphite base are all coated with spraying layers made of a ceramic material. The invention further provides a preparation method of the graphite clamping piece.
本发明公开了一种石墨卡件,该石墨卡件通过在石墨座与石墨帽连接后的外侧裸露部分喷涂陶瓷材料,将裸露的石墨包裹起来,减少裸露面积,尽可能隔绝与炉子内部反应物料的接触,从而减少碳含量,提高多晶硅品质。所述石墨卡件包括石墨卡瓣、石墨帽和石墨底座;其中,石墨底座轴心上设有石墨卡瓣,石墨帽穿过石墨卡瓣安装在石墨底座上,硅芯穿过由石墨卡瓣围成的空腔,硅芯通过石墨帽与石墨底座的连接螺纹固定在石墨底座上,所述组装好后的石墨底座与石墨帽外壁上、安装在所述石墨底座上的电极皆喷涂有陶瓷材质的喷涂层。本发明还提供了上述石墨卡件的制备方法。
Graphite clamping piece and preparation method thereof
一种石墨卡件及其制备方法
GAO ZHIMING (Autor:in) / GAO CHENGYAN (Autor:in) / BAO SHOUZHEN (Autor:in) / GAN YIWU (Autor:in) / ZHENG LIANJI (Autor:in)
11.08.2020
Patent
Elektronische Ressource
Chinesisch
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