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Graphite crucible and preparation method thereof
The invention relates to a graphite crucible and a preparation method thereof. A niobium carbide film layer is formed in the graphite crucible to reduce the participation of a carbon element in the production process of a crystal in the graphite crucible so as to inhibit the graphitization of the crystal. When niobium carbide is prepared on the graphite crucible, niobium oxide is attached to the crucible by utilizing ultrasonic waves, and then the crucible is subjected to hot carbon reduction treatment by utilizing an existing crystal growth furnace, so that a niobium carbide film layer is formed on the graphite crucible. The preparation process is simple and can be completed by utilizing an existing crystal growth furnace, and the preparation cost is low.
本发明涉及一种石墨坩埚及其制备方法,其通过在石墨坩埚内形成碳化铌膜层,来减少石墨坩埚中碳元素参与到晶体的生产过程,进而抑制晶体石墨化。而在石墨坩埚上制备碳化铌时,利用超声波将氧化铌附着到坩埚上,然后利用现有的长晶炉对坩埚进行热碳还原处理,进而在石墨坩埚上形成碳化铌膜层。该制备过程简单,利用现有的长晶炉即可完成,制备成本低。
Graphite crucible and preparation method thereof
The invention relates to a graphite crucible and a preparation method thereof. A niobium carbide film layer is formed in the graphite crucible to reduce the participation of a carbon element in the production process of a crystal in the graphite crucible so as to inhibit the graphitization of the crystal. When niobium carbide is prepared on the graphite crucible, niobium oxide is attached to the crucible by utilizing ultrasonic waves, and then the crucible is subjected to hot carbon reduction treatment by utilizing an existing crystal growth furnace, so that a niobium carbide film layer is formed on the graphite crucible. The preparation process is simple and can be completed by utilizing an existing crystal growth furnace, and the preparation cost is low.
本发明涉及一种石墨坩埚及其制备方法,其通过在石墨坩埚内形成碳化铌膜层,来减少石墨坩埚中碳元素参与到晶体的生产过程,进而抑制晶体石墨化。而在石墨坩埚上制备碳化铌时,利用超声波将氧化铌附着到坩埚上,然后利用现有的长晶炉对坩埚进行热碳还原处理,进而在石墨坩埚上形成碳化铌膜层。该制备过程简单,利用现有的长晶炉即可完成,制备成本低。
Graphite crucible and preparation method thereof
一种石墨坩埚及其制备方法
YE HONGLUN (Autor:in) / ZHONG JIAN (Autor:in) / ZHONG QILONG (Autor:in) / LIU CHONGZHI (Autor:in) / ZHANG BENYI (Autor:in) / JIANG ZHENGYU (Autor:in)
02.10.2020
Patent
Elektronische Ressource
Chinesisch
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