Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of indium tin oxide grinding balls
The invention discloses a preparation method of indium tin oxide grinding balls. The preparation method comprises the steps that adding indium oxide powder and tin oxide powder into water to be mixed,ground and granulated to obtain a granulation powder, wherein the total weight of the indium oxide powder and the tin oxide powder is 90 to 97%; then putting the granulation powder into a mold, carrying out isostatic cool pressing treatment to obtain a green body, and crushing and screening the green body to obtain a seed crystal; taking the seed crystal as the core of the ball blank, and rollingand forming the granulation powder and the seed crystal to obtain the ball blank; carrying out wax sealing on the surface of the ball blank, and then carrying out isostatic cool pressing treatment onthe ball blank; and degreasing the ball blank subjected to isostatic cool pressing, and sintering the degreased ball blank to obtain the indium tin oxide grinding balls. The indium tin oxide grindingball with high density and small crystal grains is obtained by a method of matching roll forming, isostatic cool pressing and sintering, the ITO target material prepared by the grinding balls has thedensity of more than 7.12 g/cm < 3 > and the purity of more than 99.99%, and the grinding requirement of ITO target material preparation can be met.
一种铟锡氧化物磨球的制备方法，将氧化铟粉和氧化锡粉加入水中进行混合、研磨、造粒，得到造粒粉，氧化铟粉的重量比例为氧化铟粉和氧化锡粉总重量的90%‑97%；然后将造粒粉装入模具进行冷等静压处理，得到坯体，对坯体进行破碎和筛分，得到晶种；以晶种作为球坯的核心，使造粒粉和晶种进行滚制成型，得到球坯；对球坯的表面进行蜡封，然后对球坯进行冷等静压处理；再对冷等静压后的球坯进行脱脂处理，对脱脂后的球坯进行烧结，得到铟锡氧化物磨球。本发明通过滚制成型、冷等静压、烧结相配合的方法得到密度高、晶粒小的铟锡氧化物磨球，用本发明的磨球制备得到的ITO靶材密度大于7.12 g/cm3，纯度大于99.99%，能够满足ITO靶材制备的研磨需要。
Preparation method of indium tin oxide grinding balls
The invention discloses a preparation method of indium tin oxide grinding balls. The preparation method comprises the steps that adding indium oxide powder and tin oxide powder into water to be mixed,ground and granulated to obtain a granulation powder, wherein the total weight of the indium oxide powder and the tin oxide powder is 90 to 97%; then putting the granulation powder into a mold, carrying out isostatic cool pressing treatment to obtain a green body, and crushing and screening the green body to obtain a seed crystal; taking the seed crystal as the core of the ball blank, and rollingand forming the granulation powder and the seed crystal to obtain the ball blank; carrying out wax sealing on the surface of the ball blank, and then carrying out isostatic cool pressing treatment onthe ball blank; and degreasing the ball blank subjected to isostatic cool pressing, and sintering the degreased ball blank to obtain the indium tin oxide grinding balls. The indium tin oxide grindingball with high density and small crystal grains is obtained by a method of matching roll forming, isostatic cool pressing and sintering, the ITO target material prepared by the grinding balls has thedensity of more than 7.12 g/cm < 3 > and the purity of more than 99.99%, and the grinding requirement of ITO target material preparation can be met.
一种铟锡氧化物磨球的制备方法，将氧化铟粉和氧化锡粉加入水中进行混合、研磨、造粒，得到造粒粉，氧化铟粉的重量比例为氧化铟粉和氧化锡粉总重量的90%‑97%；然后将造粒粉装入模具进行冷等静压处理，得到坯体，对坯体进行破碎和筛分，得到晶种；以晶种作为球坯的核心，使造粒粉和晶种进行滚制成型，得到球坯；对球坯的表面进行蜡封，然后对球坯进行冷等静压处理；再对冷等静压后的球坯进行脱脂处理，对脱脂后的球坯进行烧结，得到铟锡氧化物磨球。本发明通过滚制成型、冷等静压、烧结相配合的方法得到密度高、晶粒小的铟锡氧化物磨球，用本发明的磨球制备得到的ITO靶材密度大于7.12 g/cm3，纯度大于99.99%，能够满足ITO靶材制备的研磨需要。
Preparation method of indium tin oxide grinding balls
一种铟锡氧化物磨球的制备方法
SHI LINPU (Autor:in) / WANG ZHENGHONG (Autor:in) / ZHANG XIUQIN (Autor:in)
23.10.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
C09K
Materialien für Anwendungen, soweit nicht anderweitig vorgesehen
,
MATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED FOR
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