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Preparation method of solid spherical ITO granulation powder
The invention discloses a preparation method of solid spherical ITO granulation powder. The method comprises the following steps: preparing indium oxide powder and tin oxide powder into a slurry; adding a dispersing agent into the slurry, fully grinding, adding a binder, uniformly mixing, heating the slurry or adjusting the pH value of the slurry to control the viscosity of the slurry to be 100-1500mPa. S, and finally carrying out spray drying on the slurry to obtain the solid spherical ITO granulation powder. According to the preparation method, sufficient grinding and dispersing of the ITO granulation powder can be guaranteed, the solid spherical ITO granulation powder can be prepared, operation is convenient, and the requirement for high-performance target material preparation is met.
本发明公开了一种实心球形ITO造粒粉的制备方法,先将氧化铟粉末和氧化锡粉末制成浆料,之后向其中加入分散剂并研磨充分、加入粘结剂并混合均匀,然后加热浆料或调节浆料的pH值使浆料的粘度控制在100~1500mPa·s,最后对浆料进行喷雾干燥即制得实心球形的ITO造粒粉。该制备方法既能保证ITO造粒粉的充分研磨和分散,又能制备出实心球形的ITO造粒粉,且操作方便,满足高性能靶材制备的要求。
Preparation method of solid spherical ITO granulation powder
The invention discloses a preparation method of solid spherical ITO granulation powder. The method comprises the following steps: preparing indium oxide powder and tin oxide powder into a slurry; adding a dispersing agent into the slurry, fully grinding, adding a binder, uniformly mixing, heating the slurry or adjusting the pH value of the slurry to control the viscosity of the slurry to be 100-1500mPa. S, and finally carrying out spray drying on the slurry to obtain the solid spherical ITO granulation powder. According to the preparation method, sufficient grinding and dispersing of the ITO granulation powder can be guaranteed, the solid spherical ITO granulation powder can be prepared, operation is convenient, and the requirement for high-performance target material preparation is met.
本发明公开了一种实心球形ITO造粒粉的制备方法,先将氧化铟粉末和氧化锡粉末制成浆料,之后向其中加入分散剂并研磨充分、加入粘结剂并混合均匀,然后加热浆料或调节浆料的pH值使浆料的粘度控制在100~1500mPa·s,最后对浆料进行喷雾干燥即制得实心球形的ITO造粒粉。该制备方法既能保证ITO造粒粉的充分研磨和分散,又能制备出实心球形的ITO造粒粉,且操作方便,满足高性能靶材制备的要求。
Preparation method of solid spherical ITO granulation powder
一种实心球形ITO造粒粉的制备方法
SHI LINPU (Autor:in) / ZHAO YANFEI (Autor:in) / XUE JIANQIANG (Autor:in) / YANG SHUO (Autor:in)
23.10.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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