Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention relates to the technical field of diffusion furnace tubes, in particular, relates to a corrosion-resistant silicon carbide diffusion tube and a preparation method thereof, and aims to improve the compressive strength, improve the corrosion resistance and prolong the service cycle. The method comprises the following steps: S1, uniformly mixing 95-98 wt% of silicon carbide, 0.3-0.6 wt%of aluminum oxide, 0.2-0.5 wt% of iron oxide, 0.1-0.3 wt% of titanium tetrachloride, 0.1-0.3 wt% of ytterbium oxide and 1-4 wt% of boron nitride, adding water, and stirring to obtain slurry with fluidity; S2, injecting the slurry obtained in the step S1 into a diffusion tube gypsum mold, and forming a green body with certain strength in the dewatering and drying process at the same time; S3, sintering the green body in the S2 through a carbon tube furnace under the vacuum or inert protective atmosphere condition with the sintering temperature ranging from 2400 DEG C to 2500 DEG C, and forminga semi-finished product A ; S4, carrying out staged cooling on the semi-finished product A and then taking out, then carrying out polishing grinding on the inner wall of the semi-finished product A,and forming a semi-finished product B; and S5, putting the semi-finished product B into a deposition furnace, cooling and taking out to form the corrosion-resistant silicon carbide diffusion tube.
本发明涉及扩散炉管的技术领域，特别是涉及一种耐腐蚀碳化硅扩散管及其制备方法，提高耐压强度，并且提高耐腐蚀性，延长使用周期；包括以下步骤：S1、将碳化硅95‑98wt％、氧化铝0.3‑0.6wt％、氧化铁0.2‑0.5wt％、四氯化钛0.1‑0.3wt％、氧化镱0.1‑0.3wt％和氮化硼1‑4wt％混合均匀，加入水分进行搅拌，搅拌成具有流动性的泥浆；S2、将S1中泥浆注入扩散管石膏模具中，脱水干燥过程中同时形成一定强度的坯体；S3、将S2中坯体在真空或者惰性保护气氛条件下用碳管炉进行烧结，烧结温度2400‑2500摄氏度，形成半成品A；S4、将半成品A进行阶段性冷却，然后取出，然后对半成品A内壁进行抛光打磨，形成半成品B；S5、将半成品B放至沉积炉中，降温取出后形成耐腐蚀碳化硅扩散管。
The invention relates to the technical field of diffusion furnace tubes, in particular, relates to a corrosion-resistant silicon carbide diffusion tube and a preparation method thereof, and aims to improve the compressive strength, improve the corrosion resistance and prolong the service cycle. The method comprises the following steps: S1, uniformly mixing 95-98 wt% of silicon carbide, 0.3-0.6 wt%of aluminum oxide, 0.2-0.5 wt% of iron oxide, 0.1-0.3 wt% of titanium tetrachloride, 0.1-0.3 wt% of ytterbium oxide and 1-4 wt% of boron nitride, adding water, and stirring to obtain slurry with fluidity; S2, injecting the slurry obtained in the step S1 into a diffusion tube gypsum mold, and forming a green body with certain strength in the dewatering and drying process at the same time; S3, sintering the green body in the S2 through a carbon tube furnace under the vacuum or inert protective atmosphere condition with the sintering temperature ranging from 2400 DEG C to 2500 DEG C, and forminga semi-finished product A ; S4, carrying out staged cooling on the semi-finished product A and then taking out, then carrying out polishing grinding on the inner wall of the semi-finished product A,and forming a semi-finished product B; and S5, putting the semi-finished product B into a deposition furnace, cooling and taking out to form the corrosion-resistant silicon carbide diffusion tube.
本发明涉及扩散炉管的技术领域，特别是涉及一种耐腐蚀碳化硅扩散管及其制备方法，提高耐压强度，并且提高耐腐蚀性，延长使用周期；包括以下步骤：S1、将碳化硅95‑98wt％、氧化铝0.3‑0.6wt％、氧化铁0.2‑0.5wt％、四氯化钛0.1‑0.3wt％、氧化镱0.1‑0.3wt％和氮化硼1‑4wt％混合均匀，加入水分进行搅拌，搅拌成具有流动性的泥浆；S2、将S1中泥浆注入扩散管石膏模具中，脱水干燥过程中同时形成一定强度的坯体；S3、将S2中坯体在真空或者惰性保护气氛条件下用碳管炉进行烧结，烧结温度2400‑2500摄氏度，形成半成品A；S4、将半成品A进行阶段性冷却，然后取出，然后对半成品A内壁进行抛光打磨，形成半成品B；S5、将半成品B放至沉积炉中，降温取出后形成耐腐蚀碳化硅扩散管。
Corrosion-resistant silicon carbide diffusion tube and preparation method thereof
一种耐腐蚀碳化硅扩散管及其制备方法
WEI DONG (Autor:in)
06.11.2020
Patent
Elektronische Ressource
Chinesisch
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