Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Chemical vapor deposition/permeation device and method for preparing ceramic-based composite material
The invention provides a chemical vapor deposition/permeation device and a method for preparing a ceramic-based composite material, and belongs to the technical field of functional material preparation. The device comprises a precursor conveying system and a reaction furnace, wherein the precursor conveying system comprises a gaseous precursor conveying system and a liquid precursor conveying system which are arranged in parallel. According to the invention, the gaseous precursor conveying system and the liquid precursor conveying system are arranged in parallel, so that the transportation ofa gaseous precursor and a liquid precursor is realized; a first gas metering device is used for regulating and controlling the flow of a gaseous precursor, a carrier gas and a diluent gas in a gaseousprecursor conveying channel; a liquid precursor is heated, vaporized and introduced into the reaction furnace after the flow of the liquid precursor is regulated and controlled by a liquid metering device (the flow of the carrier gas and the diluent gas in a liquid precursor conveying channel is regulated and controlled by a second gas metering device); the liquid precursor can be accurately regulated and controlled, the operation is convenient, and finally, the efficient preparation of the ceramic matrix composite material with different interface phases and different matrixes can be realized.
本发明提供了一种化学气相沉积/渗透装置和制备陶瓷基复合材料的方法，属于功能材料制备技术领域。本发明中装置包括前驱体输运系统和反应炉，所述前驱体输运系统包括并联设置的气态前驱体输运系统和液态前驱体输运系统。本发明通过并联设置气态前驱体输运系统和液态前驱体输运系统，实现气态前驱体和液态前驱体的输运，采用第I气体计量装置调控气态前驱体输运通道中气态前驱体、载气和稀释气的流量，液态前驱体先通过液体计量装置调控流量后再加热汽化通入反应炉(采用第II气体计量装置调控液态前驱体输运通道中载气和稀释气的流量)，液态前驱体可以精确调控，操作方便，最终可以实现具有不同界面相以及不同基体的陶瓷基复合材料的高效制备。
Chemical vapor deposition/permeation device and method for preparing ceramic-based composite material
The invention provides a chemical vapor deposition/permeation device and a method for preparing a ceramic-based composite material, and belongs to the technical field of functional material preparation. The device comprises a precursor conveying system and a reaction furnace, wherein the precursor conveying system comprises a gaseous precursor conveying system and a liquid precursor conveying system which are arranged in parallel. According to the invention, the gaseous precursor conveying system and the liquid precursor conveying system are arranged in parallel, so that the transportation ofa gaseous precursor and a liquid precursor is realized; a first gas metering device is used for regulating and controlling the flow of a gaseous precursor, a carrier gas and a diluent gas in a gaseousprecursor conveying channel; a liquid precursor is heated, vaporized and introduced into the reaction furnace after the flow of the liquid precursor is regulated and controlled by a liquid metering device (the flow of the carrier gas and the diluent gas in a liquid precursor conveying channel is regulated and controlled by a second gas metering device); the liquid precursor can be accurately regulated and controlled, the operation is convenient, and finally, the efficient preparation of the ceramic matrix composite material with different interface phases and different matrixes can be realized.
本发明提供了一种化学气相沉积/渗透装置和制备陶瓷基复合材料的方法，属于功能材料制备技术领域。本发明中装置包括前驱体输运系统和反应炉，所述前驱体输运系统包括并联设置的气态前驱体输运系统和液态前驱体输运系统。本发明通过并联设置气态前驱体输运系统和液态前驱体输运系统，实现气态前驱体和液态前驱体的输运，采用第I气体计量装置调控气态前驱体输运通道中气态前驱体、载气和稀释气的流量，液态前驱体先通过液体计量装置调控流量后再加热汽化通入反应炉(采用第II气体计量装置调控液态前驱体输运通道中载气和稀释气的流量)，液态前驱体可以精确调控，操作方便，最终可以实现具有不同界面相以及不同基体的陶瓷基复合材料的高效制备。
Chemical vapor deposition/permeation device and method for preparing ceramic-based composite material
一种化学气相沉积/渗透装置和制备陶瓷基复合材料的方法
LI AIJUN (Autor:in) / WANG MENGQIAN (Autor:in) / JIA LINTAO (Autor:in) / ZHANG DAN (Autor:in)
27.11.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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