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Manufacturing method of Al2O3 ceramic substrate
The invention belongs to a manufacturing method of an Al2O3 ceramic substrate. The method is characterized by comprising the following steps: A, performing ball-milling operation on a substrate raw material to prepare substrate powder; B, drying the substrate powder, and removing iron after drying; C, mixing and molding the substrate powder obtained in the step B and an adhesive; D, primarily grinding the primarily mixed and formed powder; E, finely grinding the primarily ground powder in the step D, and performing size detection after fine grinding; F, after the size in the step E is detectedto be qualified, carrying out a punching step; G, performing size detection on the punched primary slices in the step F, and selecting out unqualified primary slices; and H, underfiring the qualifiedslices obtained in the step G, and carrying out size detection after underfiring, wherein the temperature change range of underfiring is as follows: the temperature is initially 120 DEG C, the temperature is gradually reduced to 120 DEG C after reaching the highest temperature of 165 DEG C, and the underfiring time is 56 hours.
本发明属于一种Al2O3陶瓷基片的制造方法,其特征在于制造步骤如下A.将基片原料进行球磨作业,制成基片粉料;B.将基片粉料进行烘干,烘干后进行除铁;C.将步骤B中得到的基片粉料与沾合剂进行混合成型;D.将初步混合成型的粉料进行初碾;E.将步骤D中初碾的粉料进行精碾,精碾过后进行尺寸检测;F.待步骤E中尺寸检测合格之后进行冲片步骤;G.对步骤F中冲片之后的初成片进行尺寸检测,将不合格的初成片选出;H.对步骤G中得到的合格成片进行生烧,生烧之后进行尺寸检测,所述生烧的温度变化范围为:初始120度,到达最高温度1665度之后逐步降温到120度,生烧时间为56小时。
Manufacturing method of Al2O3 ceramic substrate
The invention belongs to a manufacturing method of an Al2O3 ceramic substrate. The method is characterized by comprising the following steps: A, performing ball-milling operation on a substrate raw material to prepare substrate powder; B, drying the substrate powder, and removing iron after drying; C, mixing and molding the substrate powder obtained in the step B and an adhesive; D, primarily grinding the primarily mixed and formed powder; E, finely grinding the primarily ground powder in the step D, and performing size detection after fine grinding; F, after the size in the step E is detectedto be qualified, carrying out a punching step; G, performing size detection on the punched primary slices in the step F, and selecting out unqualified primary slices; and H, underfiring the qualifiedslices obtained in the step G, and carrying out size detection after underfiring, wherein the temperature change range of underfiring is as follows: the temperature is initially 120 DEG C, the temperature is gradually reduced to 120 DEG C after reaching the highest temperature of 165 DEG C, and the underfiring time is 56 hours.
本发明属于一种Al2O3陶瓷基片的制造方法,其特征在于制造步骤如下A.将基片原料进行球磨作业,制成基片粉料;B.将基片粉料进行烘干,烘干后进行除铁;C.将步骤B中得到的基片粉料与沾合剂进行混合成型;D.将初步混合成型的粉料进行初碾;E.将步骤D中初碾的粉料进行精碾,精碾过后进行尺寸检测;F.待步骤E中尺寸检测合格之后进行冲片步骤;G.对步骤F中冲片之后的初成片进行尺寸检测,将不合格的初成片选出;H.对步骤G中得到的合格成片进行生烧,生烧之后进行尺寸检测,所述生烧的温度变化范围为:初始120度,到达最高温度1665度之后逐步降温到120度,生烧时间为56小时。
Manufacturing method of Al2O3 ceramic substrate
一种Al2O3陶瓷基片的制造方法
TIAN MAOBIAO (Autor:in) / LIU RUISHENG (Autor:in) / ZHOU WEI (Autor:in) / YANG HAIRONG (Autor:in)
08.12.2020
Patent
Elektronische Ressource
Chinesisch
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