Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Carbon/carbon spliced heat preservation cylinder for monocrystalline silicon Czochralski furnace and manufacturing method of carbon/carbon spliced heat preservation cylinder
The invention discloses a carbon/carbon spliced heat preservation cylinder for a monocrystalline silicon Czochralski furnace. The heat preservation cylinder comprises N carbon/carbon arc petals, the adjacent N carbon/carbon arc petals are connected through a mortise and tenon joint structure around the axis of the carbon/carbon spliced heat preservation cylinder along the circumferential direction, and M carbon/carbon pins are arranged on the mortise and tenon joint parts of the adjacent carbon/carbon arc petals, tenons are arranged at the sides of the N carbon/carbon arc petals, and mortises are formed at the other sides of the N carbon/carbon arc petals. The invention further discloses a manufacturing method of the carbon/carbon spliced heat preservation cylinder for the monocrystalline silicon Czochralski furnace, tenons of the carbon/carbon arc petals are installed in mortises of the adjacent carbon/carbon arc petals, then pins are installed, and the carbon/carbon spliced heat preservation cylinder is obtained through coating preparation and purification. The tenon-and-mortise joint structure is adopted to form a barrier at a splicing seam, so that erosion of heat and erosion gas on the splicing seam and an outer-layer device and components of the heat preservation cylinder is avoided, and the heat preservation cylinder is suitable for the monocrystalline silicon Czochralski furnace; and the manufacturing method disclosed by the invention is simple and is beneficial to realizing large-batch production.
本发明公开了一种单晶硅直拉炉用炭/炭拼接保温筒，包括N片炭/炭弧瓣，N片炭/炭弧瓣相邻之间通过榫卯连接结构且沿着圆周方向环绕炭/炭拼接保温筒的轴心线连接，相邻之间的炭/炭弧瓣榫卯连接部位上均设置有M个炭/炭销钉，N片炭/炭弧瓣的一侧均设置有榫头，另一侧均设置有榫槽；本发明还公开了一种单晶硅直拉炉用炭/炭拼接保温筒的制造方法，将炭/炭弧瓣的榫头装入相邻炭/炭弧瓣的榫槽中后安装销钉，经制备涂层和纯化得到炭/炭拼接保温筒。本发明采用榫卯连接结构在拼接接缝处形成阻隔，避免了热量和侵蚀气体对拼接裂缝及保温筒外层装置和部件的侵蚀作用，适用于单晶硅直拉炉；本发明的制造方法简单，有利于实现大批量生产。
Carbon/carbon spliced heat preservation cylinder for monocrystalline silicon Czochralski furnace and manufacturing method of carbon/carbon spliced heat preservation cylinder
The invention discloses a carbon/carbon spliced heat preservation cylinder for a monocrystalline silicon Czochralski furnace. The heat preservation cylinder comprises N carbon/carbon arc petals, the adjacent N carbon/carbon arc petals are connected through a mortise and tenon joint structure around the axis of the carbon/carbon spliced heat preservation cylinder along the circumferential direction, and M carbon/carbon pins are arranged on the mortise and tenon joint parts of the adjacent carbon/carbon arc petals, tenons are arranged at the sides of the N carbon/carbon arc petals, and mortises are formed at the other sides of the N carbon/carbon arc petals. The invention further discloses a manufacturing method of the carbon/carbon spliced heat preservation cylinder for the monocrystalline silicon Czochralski furnace, tenons of the carbon/carbon arc petals are installed in mortises of the adjacent carbon/carbon arc petals, then pins are installed, and the carbon/carbon spliced heat preservation cylinder is obtained through coating preparation and purification. The tenon-and-mortise joint structure is adopted to form a barrier at a splicing seam, so that erosion of heat and erosion gas on the splicing seam and an outer-layer device and components of the heat preservation cylinder is avoided, and the heat preservation cylinder is suitable for the monocrystalline silicon Czochralski furnace; and the manufacturing method disclosed by the invention is simple and is beneficial to realizing large-batch production.
本发明公开了一种单晶硅直拉炉用炭/炭拼接保温筒，包括N片炭/炭弧瓣，N片炭/炭弧瓣相邻之间通过榫卯连接结构且沿着圆周方向环绕炭/炭拼接保温筒的轴心线连接，相邻之间的炭/炭弧瓣榫卯连接部位上均设置有M个炭/炭销钉，N片炭/炭弧瓣的一侧均设置有榫头，另一侧均设置有榫槽；本发明还公开了一种单晶硅直拉炉用炭/炭拼接保温筒的制造方法，将炭/炭弧瓣的榫头装入相邻炭/炭弧瓣的榫槽中后安装销钉，经制备涂层和纯化得到炭/炭拼接保温筒。本发明采用榫卯连接结构在拼接接缝处形成阻隔，避免了热量和侵蚀气体对拼接裂缝及保温筒外层装置和部件的侵蚀作用，适用于单晶硅直拉炉；本发明的制造方法简单，有利于实现大批量生产。
Carbon/carbon spliced heat preservation cylinder for monocrystalline silicon Czochralski furnace and manufacturing method of carbon/carbon spliced heat preservation cylinder
一种单晶硅直拉炉用炭/炭拼接保温筒及其制造方法
ZHANG LINGYU (Autor:in) / CHENG HAO (Autor:in) / HAN LIYU (Autor:in) / SU CHAO (Autor:in) / ZHANG YACHAO (Autor:in) / ZHOU YUANLONG (Autor:in) / MA HENG (Autor:in) / WANG ZHIHU (Autor:in) / XING RUPENG (Autor:in)
09.04.2021
Patent
Elektronische Ressource
Chinesisch
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