Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of thermocouple sheath for PVT method high-temperature growth equipment
The invention discloses a preparation method of a thermocouple sheath for PVT method high-temperature growth equipment, relates to a preparation method of a thermocouple sheath, and aims to solve the technical problem that the tungsten-rhenium wire of the high-temperature thermocouple is extremely easy to oxidize and bend. The method comprises the following steps: putting Si3N4, ZrO2 and Y2O3 into a three-dimensional vibration mixer, fully mixing, pressing in a prefabricated mold, sintering, depositing, and annealing for 2 hours to obtain the thermocouple sheath for the PVT method high-temperature growth equipment. The ZrO2 toughened Si3N4 material can ensure that the toughness of the extremely thermal shock resistant Si3N4 is further enhanced, so that the protective jacket is prevented from being bent and broken when being in contact with the crucible top and the crucible bottom at the temperature of 1850-2200 DEG C, and on the other hand, the stability of the protective jacket can also be ensured when the temperature is suddenly increased and decreased. The invention belongs to the field of preparation of galvanic couple sheaths.
PVT法高温生长设备用热电偶护套的制备方法，它涉及一种电偶护套的制备方法。本发明是为了解决高温热电偶钨铼丝极易被氧化、易弯曲的技术问题。本方法如下：将Si3N4、ZrO2和Y2O3放入三维振动混合器中充分混合放入预制好的模具压制，然后烧结、沉积、退火处理2小时，即得PVT法高温生长设备用热电偶护套。ZrO2增韧Si3N4材料可以保证极抗热震的Si3N4的韧性进一步增强，这样在温度1850‑2200℃以上的温度，保证保护套不会因接触坩埚顶和坩埚底时产生弯曲和碎裂，另一方面在突然升温和降温时，也可以保证护套的稳定性。本发明属于电偶护套的制备领域。
Preparation method of thermocouple sheath for PVT method high-temperature growth equipment
The invention discloses a preparation method of a thermocouple sheath for PVT method high-temperature growth equipment, relates to a preparation method of a thermocouple sheath, and aims to solve the technical problem that the tungsten-rhenium wire of the high-temperature thermocouple is extremely easy to oxidize and bend. The method comprises the following steps: putting Si3N4, ZrO2 and Y2O3 into a three-dimensional vibration mixer, fully mixing, pressing in a prefabricated mold, sintering, depositing, and annealing for 2 hours to obtain the thermocouple sheath for the PVT method high-temperature growth equipment. The ZrO2 toughened Si3N4 material can ensure that the toughness of the extremely thermal shock resistant Si3N4 is further enhanced, so that the protective jacket is prevented from being bent and broken when being in contact with the crucible top and the crucible bottom at the temperature of 1850-2200 DEG C, and on the other hand, the stability of the protective jacket can also be ensured when the temperature is suddenly increased and decreased. The invention belongs to the field of preparation of galvanic couple sheaths.
PVT法高温生长设备用热电偶护套的制备方法，它涉及一种电偶护套的制备方法。本发明是为了解决高温热电偶钨铼丝极易被氧化、易弯曲的技术问题。本方法如下：将Si3N4、ZrO2和Y2O3放入三维振动混合器中充分混合放入预制好的模具压制，然后烧结、沉积、退火处理2小时，即得PVT法高温生长设备用热电偶护套。ZrO2增韧Si3N4材料可以保证极抗热震的Si3N4的韧性进一步增强，这样在温度1850‑2200℃以上的温度，保证保护套不会因接触坩埚顶和坩埚底时产生弯曲和碎裂，另一方面在突然升温和降温时，也可以保证护套的稳定性。本发明属于电偶护套的制备领域。
Preparation method of thermocouple sheath for PVT method high-temperature growth equipment
PVT法高温生长设备用热电偶护套的制备方法
04.06.2021
Patent
Elektronische Ressource
Chinesisch
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