Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Multi-layer metal-coated high-thermal-conductivity aluminum nitride ceramic substrate and preparation method thereof
The invention discloses a multi-layer metal-coated high-thermal-conductivity aluminum nitride ceramic substrate and a preparation method thereof. The preparation method comprises the following steps: respectively selecting metal nickel or nickel alloy powder and metal copper or copper alloy powder, and spraying the metal or metal alloy powder on the surface of an aluminum nitride ceramic substrate covered with a mask plate with a specific pattern in a molten state through an atmospheric plasma spraying technology; and adjusting a plurality of process parameters and a plasma torch structure to prepare the multi-layer metal-coated aluminum nitride ceramic substrate with high interface bonding strength between the metal layer and the aluminum nitride ceramic, high heat conductivity and high conductivity. According to the method, metal or metal alloy powder is directly sprayed on the high-thermal-conductivity aluminum nitride ceramic substrate covered with the mask with the circuit patterns, and the multi-layer metal-coated circuit ceramic substrate with different patterns and high line width precision is obtained.
本申请公开了一种多层金属覆膜高导热氮化铝陶瓷基板及制备方法。所述制备方法分别选用金属镍或镍合金粉体，金属铜或铜合金粉体，通过大气等离子喷涂技术将金属或金属合金粉体在熔融状态下喷涂在覆盖有特定图案掩模版的氮化铝陶瓷基板表面，调整诸多工艺参数和等离子体喷枪结构制备出金属层与氮化铝陶瓷界面结合强度高、热导率高，电导率高的多层金属覆膜氮化铝陶瓷基板。本发明直接将金属或金属合金粉末喷涂在敷盖有电路图案的掩模的高导热氮化铝陶瓷基板上，得到不同图案且线宽精度高的多层金属覆膜电路陶瓷基板。
Multi-layer metal-coated high-thermal-conductivity aluminum nitride ceramic substrate and preparation method thereof
The invention discloses a multi-layer metal-coated high-thermal-conductivity aluminum nitride ceramic substrate and a preparation method thereof. The preparation method comprises the following steps: respectively selecting metal nickel or nickel alloy powder and metal copper or copper alloy powder, and spraying the metal or metal alloy powder on the surface of an aluminum nitride ceramic substrate covered with a mask plate with a specific pattern in a molten state through an atmospheric plasma spraying technology; and adjusting a plurality of process parameters and a plasma torch structure to prepare the multi-layer metal-coated aluminum nitride ceramic substrate with high interface bonding strength between the metal layer and the aluminum nitride ceramic, high heat conductivity and high conductivity. According to the method, metal or metal alloy powder is directly sprayed on the high-thermal-conductivity aluminum nitride ceramic substrate covered with the mask with the circuit patterns, and the multi-layer metal-coated circuit ceramic substrate with different patterns and high line width precision is obtained.
本申请公开了一种多层金属覆膜高导热氮化铝陶瓷基板及制备方法。所述制备方法分别选用金属镍或镍合金粉体，金属铜或铜合金粉体，通过大气等离子喷涂技术将金属或金属合金粉体在熔融状态下喷涂在覆盖有特定图案掩模版的氮化铝陶瓷基板表面，调整诸多工艺参数和等离子体喷枪结构制备出金属层与氮化铝陶瓷界面结合强度高、热导率高，电导率高的多层金属覆膜氮化铝陶瓷基板。本发明直接将金属或金属合金粉末喷涂在敷盖有电路图案的掩模的高导热氮化铝陶瓷基板上，得到不同图案且线宽精度高的多层金属覆膜电路陶瓷基板。
Multi-layer metal-coated high-thermal-conductivity aluminum nitride ceramic substrate and preparation method thereof
一种多层金属覆膜高导热氮化铝陶瓷基板及制备方法
PAN WEI (Autor:in) / LIU GUANGHUA (Autor:in)
23.07.2021
Patent
Elektronische Ressource
Chinesisch
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