Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Power supply cabinet of semiconductor etching equipment
The invention discloses a power supply cabinet of semiconductor etching equipment, and the cabinet comprises a cabinet body and a power distribution system; the power distribution system comprises a main incoming circuit breaker and other functional modules which are arranged in an internal cavity of the cabinet body; the cabinet body is provided with a cabinet door, the cabinet door comprises a first door body and a second door body which can be opened in two directions, the first door body and the second door body are respectively and correspondingly provided with a first door lock and a second door lock, and the first door body is further provided with a main incoming line circuit breaker operating mechanism; the main incoming line circuit breaker operating mechanism is connected with the main incoming line circuit breaker and is at least used for closing or opening the main incoming line circuit breaker, and the first door lock is further in mechanical linkage with the main incoming line circuit breaker and the second door lock through a metal connecting rod of the main incoming line circuit breaker operating mechanism and a folded edge of the first door body. Functional modules in the power supply cabinet are reasonably arranged, hidden layout of cables in the cabinet body is achieved, the internal structure is more orderly, and later maintenance and repair are facilitated.
本发明公开了一种半导体刻蚀设备的电源柜，包括柜体和配电系统，所述配电系统包括设置在所述柜体内部腔室中的总进线断路器和其他功能模块；所述柜体上设置有柜门，所述柜门包括可双向打开的第一门体和第二门体，所述第一门体和第二门体上分别对应设置有第一门锁和第二门锁，所述第一门体上还设置有总进线断路器操作机构，所述总进线断路器操作机构与所述总进线断路器连接,并至少用于闭合或断开所述总进线断路器,所述第一门锁还分别经总进线断路器操作机构的金属连杆、第一门体的折边与总进线断路器、第二门锁机械连锁。本发明电源柜内部的功能模块布局合理，实现了对柜体内部线缆的隐藏式布局，使得内部结构更加整齐，便于后期维护和维修。
Power supply cabinet of semiconductor etching equipment
The invention discloses a power supply cabinet of semiconductor etching equipment, and the cabinet comprises a cabinet body and a power distribution system; the power distribution system comprises a main incoming circuit breaker and other functional modules which are arranged in an internal cavity of the cabinet body; the cabinet body is provided with a cabinet door, the cabinet door comprises a first door body and a second door body which can be opened in two directions, the first door body and the second door body are respectively and correspondingly provided with a first door lock and a second door lock, and the first door body is further provided with a main incoming line circuit breaker operating mechanism; the main incoming line circuit breaker operating mechanism is connected with the main incoming line circuit breaker and is at least used for closing or opening the main incoming line circuit breaker, and the first door lock is further in mechanical linkage with the main incoming line circuit breaker and the second door lock through a metal connecting rod of the main incoming line circuit breaker operating mechanism and a folded edge of the first door body. Functional modules in the power supply cabinet are reasonably arranged, hidden layout of cables in the cabinet body is achieved, the internal structure is more orderly, and later maintenance and repair are facilitated.
本发明公开了一种半导体刻蚀设备的电源柜，包括柜体和配电系统，所述配电系统包括设置在所述柜体内部腔室中的总进线断路器和其他功能模块；所述柜体上设置有柜门，所述柜门包括可双向打开的第一门体和第二门体，所述第一门体和第二门体上分别对应设置有第一门锁和第二门锁，所述第一门体上还设置有总进线断路器操作机构，所述总进线断路器操作机构与所述总进线断路器连接,并至少用于闭合或断开所述总进线断路器,所述第一门锁还分别经总进线断路器操作机构的金属连杆、第一门体的折边与总进线断路器、第二门锁机械连锁。本发明电源柜内部的功能模块布局合理，实现了对柜体内部线缆的隐藏式布局，使得内部结构更加整齐，便于后期维护和维修。
Power supply cabinet of semiconductor etching equipment
半导体刻蚀设备的电源柜
QIAN ZONGNAN (Autor:in)
07.09.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
H02B
BOARDS, SUBSTATIONS, OR SWITCHING ARRANGEMENTS FOR THE SUPPLY OR DISTRIBUTION OF ELECTRIC POWER
,
Schalttafeln, Unterstationen oder Schaltanordnungen für die Abgabe oder Verteilung elektrischer Energie
/
E05B
LOCKS
,
Schlösser
/
E05C
Riegel oder Feststellvorrichtungen für Flügel, insbesondere für Türen oder Fenster
,
BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
/
H02H
EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
,
Schutzschaltungsanordnungen
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