Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Capacitive pressure sensor electrode and rear-end circuit sealing method
The invention relates to the field of sensors, in particular to a capacitive pressure sensor electrode and rear-end circuit sealing method. A ceramic material is adopted as a substrate and a sensitive diaphragm. The technological process comprises the steps of electrode pattern preparation, ceramic chip cleaning, gold electrode preparation, gold electrode heat treatment, slurry for silk-screen printing, packaging, pressure sintering and circuit connection and signal conditioning. The non-linear problem of the fringe effect is effectively reduced, and the capacitive pressure sensor electrode has the advantages of being high in measurement precision, small in error, high in measurement sensitivity and the like and low in process cost.
本发明涉及传感器领域，尤其涉及一种电容式压力传感器电极及后端电路封接方法。采用陶瓷材料作为基底和敏感膜片，工艺过程包括电极图案制备、陶瓷片清洗、制备金电极、热处理金电极、丝网印刷浆料、封装、加压烧结以及电路连接与信号调理。本发明有效减少边缘效应的非线性问题，具有测量精度高、误差小、测量灵敏度高等特点，而且工艺成本低。
Capacitive pressure sensor electrode and rear-end circuit sealing method
The invention relates to the field of sensors, in particular to a capacitive pressure sensor electrode and rear-end circuit sealing method. A ceramic material is adopted as a substrate and a sensitive diaphragm. The technological process comprises the steps of electrode pattern preparation, ceramic chip cleaning, gold electrode preparation, gold electrode heat treatment, slurry for silk-screen printing, packaging, pressure sintering and circuit connection and signal conditioning. The non-linear problem of the fringe effect is effectively reduced, and the capacitive pressure sensor electrode has the advantages of being high in measurement precision, small in error, high in measurement sensitivity and the like and low in process cost.
本发明涉及传感器领域，尤其涉及一种电容式压力传感器电极及后端电路封接方法。采用陶瓷材料作为基底和敏感膜片，工艺过程包括电极图案制备、陶瓷片清洗、制备金电极、热处理金电极、丝网印刷浆料、封装、加压烧结以及电路连接与信号调理。本发明有效减少边缘效应的非线性问题，具有测量精度高、误差小、测量灵敏度高等特点，而且工艺成本低。
Capacitive pressure sensor electrode and rear-end circuit sealing method
一种电容式压力传感器电极及后端电路封接方法
QIAO GUANJUN (Autor:in) / WANG LIPENG (Autor:in) / SHAO HAICHENG (Autor:in) / LIU GUIWU (Autor:in) / LU HAOJIE (Autor:in) / ZHANG XIANGZHAO (Autor:in)
10.12.2021
Patent
Elektronische Ressource
Chinesisch
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