Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Method for preparing serial nanocone periodic array
The invention belongs to the technical field of nano composite material synthesis, and particularly relates to a preparation method of an interlinked nanocone periodic array. According to the invention, a novel serial nanocone periodic array is prepared by combining a silicon dioxide colloidal sphere self-assembly technology, a plasma etching technology and a physical deposition technology; according to the preparation method, serial nanocone periodic arrays of different sizes can be obtained by changing the size of colloidal spheres, the plasma etching time and the thickness of deposited metal, the preparation method is relatively simple, and the prepared serial nanocone periodic array has the advantages of good uniformity, high order degree and strong repeatability, and is suitable for industrial production. And the method can be effectively copied and applied on a large scale.
本发明属于纳米复合材料合成技术领域，具体涉及一种连环纳米锥周期性阵列制备方法。本发明通过将二氧化硅胶体球自组装技术、等离子刻蚀技术与物理沉积技术相结合，制备出一种新颖的连环纳米锥周期性阵列，该制备方法可以通过改变胶体球的尺寸、等离子刻蚀时间和沉积金属厚度得到不同尺寸的连环纳米锥周期性阵列，且此制备方法较为简单，制备出的连环纳米锥周期性阵列具有均匀性好、有序度高、可重复性强的优点，能够有效地被大规模复制应用。
Method for preparing serial nanocone periodic array
The invention belongs to the technical field of nano composite material synthesis, and particularly relates to a preparation method of an interlinked nanocone periodic array. According to the invention, a novel serial nanocone periodic array is prepared by combining a silicon dioxide colloidal sphere self-assembly technology, a plasma etching technology and a physical deposition technology; according to the preparation method, serial nanocone periodic arrays of different sizes can be obtained by changing the size of colloidal spheres, the plasma etching time and the thickness of deposited metal, the preparation method is relatively simple, and the prepared serial nanocone periodic array has the advantages of good uniformity, high order degree and strong repeatability, and is suitable for industrial production. And the method can be effectively copied and applied on a large scale.
本发明属于纳米复合材料合成技术领域，具体涉及一种连环纳米锥周期性阵列制备方法。本发明通过将二氧化硅胶体球自组装技术、等离子刻蚀技术与物理沉积技术相结合，制备出一种新颖的连环纳米锥周期性阵列，该制备方法可以通过改变胶体球的尺寸、等离子刻蚀时间和沉积金属厚度得到不同尺寸的连环纳米锥周期性阵列，且此制备方法较为简单，制备出的连环纳米锥周期性阵列具有均匀性好、有序度高、可重复性强的优点，能够有效地被大规模复制应用。
Method for preparing serial nanocone periodic array
一种连环纳米锥周期性阵列制备方法
ZHAO XIAOYU (Autor:in) / AN TONGGE (Autor:in) / WEN JIAHONG (Autor:in) / ZHANG JIAN (Autor:in) / GUO XIAOJIE (Autor:in) / WANG YAXIN (Autor:in) / ZHONG JIASONG (Autor:in) / ZHANG YONGJUN (Autor:in)
12.04.2022
Patent
Elektronische Ressource
Chinesisch
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