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Silicate microwave dielectric ceramic with low dielectric constant and preparation method thereof
The invention discloses a low dielectric constant silicate microwave dielectric ceramic and a preparation method thereof, the chemical expression of the ceramic is Ca < 1-x-y/2 > A < x > Mg < 1-y/2 > B < y > Si < 3 > O < 9-z > Ba5Si < 8 > O < 21 >, b is Zn, Co or Mn; 0.02 < = x < = 0.10; 0.10 < = y < = 0.50; 0.30 < = z < = 0.50. The preparation process of the ceramic material sequentially comprises the following steps: synthesizing Ca (1-x-y)/2AxMg (1-y)/2BySi3O9 powder, synthesizing Ba5Si8O21 powder, preparing composite powder, carrying out ball milling, and carrying out DCS (distributed control system) rapid sintering to obtain the ceramic. On one hand, the Qf value of a CaMgSi3O9 crystal phase is improved through trace Sr ion substitution, on the other hand, Mn ions are obtained through Zn or Co to co-replace A and B sites to regulate and control the layered structure of the CaMgSi3O9 structure, and then the Qf value and the tau f value of the CaMgSi3O9 structure are regulated and controlled. In addition, the dielectric constant of the prepared Ca < 1-x-y/2A < x > Mg < 1-y/2B < y > Si < 3 > O < 9-z > Ba5Si < 8 > O < 21 > ceramic material is 5.5-8.2, the Qf value is 28500-76450 GHz, the tau < f > value is within +/-15 ppm/DEG C, the preparation process is simple, the preparation period is short, the process stability is good, the anti-reduction characteristic is good, a base metal inner electrode can resist reduction atmosphere sintering, and the ceramic material is suitable for manufacturing a temperature compensation type MLCC capacitor.
本发明公开了一种低介电常数硅酸盐微波介质陶瓷及其制备方法，该陶瓷的化学表达式为Ca1‑x‑y/2AxMg1‑y/2BySi3O9‑zBa5Si8O21，其中A=Sr、Ba；B=Zn、Co、Mn；0.02≤x≤0.10；0.10≤y≤0.50；0.30≤z≤0.50。该陶瓷材料制备工艺依次如下：合成Ca1‑x‑y/2AxMg1‑y/2BySi3O9粉体、合成Ba5Si8O21粉体、复合粉末配制、球磨、DCS快速烧结成瓷。本发明一方面通过微量Sr离子取代提高CaMgSi3O9晶相的Qf值，另一方面通过Zn或Co获Mn离子共取代A、B位调控CaMgSi3O9结构的层状结构，进而调控其Qf值和τf值。此外，本发明制备所得Ca1‑x‑y/2AxMg1‑y/2BySi3O9‑zBa5Si8O21陶瓷材料的介电常数为5.5~8.2，Qf值为28500~76450GHz，τf值在±15 ppm/℃以内，且制备工艺简单，制备周期短，工艺稳定好，抗还原特性好，可耐还原气氛烧结而使用贱金属内电极，适合制造温度补偿型MLCC电容器。
Silicate microwave dielectric ceramic with low dielectric constant and preparation method thereof
The invention discloses a low dielectric constant silicate microwave dielectric ceramic and a preparation method thereof, the chemical expression of the ceramic is Ca < 1-x-y/2 > A < x > Mg < 1-y/2 > B < y > Si < 3 > O < 9-z > Ba5Si < 8 > O < 21 >, b is Zn, Co or Mn; 0.02 < = x < = 0.10; 0.10 < = y < = 0.50; 0.30 < = z < = 0.50. The preparation process of the ceramic material sequentially comprises the following steps: synthesizing Ca (1-x-y)/2AxMg (1-y)/2BySi3O9 powder, synthesizing Ba5Si8O21 powder, preparing composite powder, carrying out ball milling, and carrying out DCS (distributed control system) rapid sintering to obtain the ceramic. On one hand, the Qf value of a CaMgSi3O9 crystal phase is improved through trace Sr ion substitution, on the other hand, Mn ions are obtained through Zn or Co to co-replace A and B sites to regulate and control the layered structure of the CaMgSi3O9 structure, and then the Qf value and the tau f value of the CaMgSi3O9 structure are regulated and controlled. In addition, the dielectric constant of the prepared Ca < 1-x-y/2A < x > Mg < 1-y/2B < y > Si < 3 > O < 9-z > Ba5Si < 8 > O < 21 > ceramic material is 5.5-8.2, the Qf value is 28500-76450 GHz, the tau < f > value is within +/-15 ppm/DEG C, the preparation process is simple, the preparation period is short, the process stability is good, the anti-reduction characteristic is good, a base metal inner electrode can resist reduction atmosphere sintering, and the ceramic material is suitable for manufacturing a temperature compensation type MLCC capacitor.
本发明公开了一种低介电常数硅酸盐微波介质陶瓷及其制备方法，该陶瓷的化学表达式为Ca1‑x‑y/2AxMg1‑y/2BySi3O9‑zBa5Si8O21，其中A=Sr、Ba；B=Zn、Co、Mn；0.02≤x≤0.10；0.10≤y≤0.50；0.30≤z≤0.50。该陶瓷材料制备工艺依次如下：合成Ca1‑x‑y/2AxMg1‑y/2BySi3O9粉体、合成Ba5Si8O21粉体、复合粉末配制、球磨、DCS快速烧结成瓷。本发明一方面通过微量Sr离子取代提高CaMgSi3O9晶相的Qf值，另一方面通过Zn或Co获Mn离子共取代A、B位调控CaMgSi3O9结构的层状结构，进而调控其Qf值和τf值。此外，本发明制备所得Ca1‑x‑y/2AxMg1‑y/2BySi3O9‑zBa5Si8O21陶瓷材料的介电常数为5.5~8.2，Qf值为28500~76450GHz，τf值在±15 ppm/℃以内，且制备工艺简单，制备周期短，工艺稳定好，抗还原特性好，可耐还原气氛烧结而使用贱金属内电极，适合制造温度补偿型MLCC电容器。
Silicate microwave dielectric ceramic with low dielectric constant and preparation method thereof
一种低介电常数硅酸盐微波介质陶瓷及其制备方法
LYU XUEPENG (Autor:in)
26.04.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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