Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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High purity cordierite materials for semiconductor applications
Disclosed is a sintered cordierite body comprising: 90% to 98% by volume of a cordierite crystal phase, as measured using x-ray diffraction, SEM and image processing methods, in which the sintered cordierite body has at least one surface comprising pores having a diameter of 0.1 [mu] m to 5 [mu] m, as measured using SEM and image processing methods. The cordierite sintered body has a Young's modulus of about 125 GPa or more and a volume porosity of less than about 4%. Also disclosed is a method for preparing a sintered cordierite body.
本发明公开了一种堇青石烧结体，该堇青石烧结体包含：90体积％至98体积％的堇青石晶相，如使用x射线衍射、SEM和图像处理方法所测量的，其中该堇青石烧结体具有至少一个表面，该至少一个表面包含直径为0.1um至5um的孔，如使用SEM和图像处理方法所测量的。该堇青石烧结体的杨氏模量为约125GPa或更大，并且体积孔隙率小于约4％。还公开了制备堇青石烧结体的方法。
High purity cordierite materials for semiconductor applications
Disclosed is a sintered cordierite body comprising: 90% to 98% by volume of a cordierite crystal phase, as measured using x-ray diffraction, SEM and image processing methods, in which the sintered cordierite body has at least one surface comprising pores having a diameter of 0.1 [mu] m to 5 [mu] m, as measured using SEM and image processing methods. The cordierite sintered body has a Young's modulus of about 125 GPa or more and a volume porosity of less than about 4%. Also disclosed is a method for preparing a sintered cordierite body.
本发明公开了一种堇青石烧结体，该堇青石烧结体包含：90体积％至98体积％的堇青石晶相，如使用x射线衍射、SEM和图像处理方法所测量的，其中该堇青石烧结体具有至少一个表面，该至少一个表面包含直径为0.1um至5um的孔，如使用SEM和图像处理方法所测量的。该堇青石烧结体的杨氏模量为约125GPa或更大，并且体积孔隙率小于约4％。还公开了制备堇青石烧结体的方法。
High purity cordierite materials for semiconductor applications
用于半导体应用的高纯度堇青石材料
WALKER LUKE (Autor:in) / BISTA SIMONE (Autor:in) / DORON MICHAEL J (Autor:in) / KENNEDY SCOTT R (Autor:in)
30.08.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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