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Low-stress high-refractive-index film, material and preparation method
The invention belongs to the technical field of mixed oxides, and particularly relates to a low-stress high-refractive-index film, a material and a preparation method. The defects of cracking and the like in the prior art are overcome. The preparation method of the low-stress high-refractive-index thin film material comprises the following steps: S1, ball-milling powder; s2, mixing and bonding; s3, performing constant-temperature and constant-humidity standing; and S4, melting. The method has the advantages that the internal tensile stress performance of the material is improved, the defects that single Ti3O5 is soft and brittle in texture and the internal stress form is pressure stress are overcome, and the problem that a Ti3O5 film is prone to cracking due to environment temperature fluctuation and absorption of moisture in air in long-term use is fundamentally solved.
本发明属于混合氧化物技术领域,尤其涉及一种低应力高折射率薄膜、材料及制备方法。它解决了现有技术开裂等缺陷。本低应力高折射率薄膜材料的制备方法包括如下步骤:S1、球磨制粉;S2、混合粘接;S3、恒温恒湿静置;S4、熔融。本申请优点:使得材料的内部拉应力性能提升,解决了单一Ti3O5质地软脆、内部应力形式为压应力的缺点,从根本上解决Ti3O5薄膜在长期使用中,因环境温度波动和膜层吸收空气中水分容易开裂的问题。
Low-stress high-refractive-index film, material and preparation method
The invention belongs to the technical field of mixed oxides, and particularly relates to a low-stress high-refractive-index film, a material and a preparation method. The defects of cracking and the like in the prior art are overcome. The preparation method of the low-stress high-refractive-index thin film material comprises the following steps: S1, ball-milling powder; s2, mixing and bonding; s3, performing constant-temperature and constant-humidity standing; and S4, melting. The method has the advantages that the internal tensile stress performance of the material is improved, the defects that single Ti3O5 is soft and brittle in texture and the internal stress form is pressure stress are overcome, and the problem that a Ti3O5 film is prone to cracking due to environment temperature fluctuation and absorption of moisture in air in long-term use is fundamentally solved.
本发明属于混合氧化物技术领域,尤其涉及一种低应力高折射率薄膜、材料及制备方法。它解决了现有技术开裂等缺陷。本低应力高折射率薄膜材料的制备方法包括如下步骤:S1、球磨制粉;S2、混合粘接;S3、恒温恒湿静置;S4、熔融。本申请优点:使得材料的内部拉应力性能提升,解决了单一Ti3O5质地软脆、内部应力形式为压应力的缺点,从根本上解决Ti3O5薄膜在长期使用中,因环境温度波动和膜层吸收空气中水分容易开裂的问题。
Low-stress high-refractive-index film, material and preparation method
低应力高折射率薄膜、材料及制备方法
GAO JIANQIU (Autor:in) / LIANG HAILIANG (Autor:in) / XU XIAOBIN (Autor:in)
16.09.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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