Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of plasma spraying yttrium oxide coating powder
The invention provides a preparation method of yttrium oxide coating powder for plasma spraying, and belongs to the technical field of ceramic powder for thermal spraying. The yttrium oxide powder with the large original crystal size is adopted as a raw material, a small amount of aluminum sol is introduced to serve as a sintering aid, the sintering temperature of the large-size original crystal yttrium oxide can be greatly reduced, the corrosion resistance of the large-size original crystal yttrium oxide powder can be reserved, the aluminum oxide spraying powder can also serve as a spraying material for semiconductor etching, and the service life of the aluminum oxide spraying powder is prolonged. Therefore, the final use effect of the powder is not affected.
本发明提供了一种等离子喷涂氧化钇涂层粉的制备方法，热喷涂用陶瓷粉体技术领域。本发明采用原晶尺寸较大的氧化钇粉体为原料，并引入少量铝溶胶做为烧结助剂，既可以大幅降低大尺寸原晶氧化钇的烧结温度，又可以保留大尺寸原晶氧化钇粉体的抗侵蚀性，氧化铝喷涂粉本身也能够做为半导体蚀刻的喷涂材料，所以不会影响粉体的最终使用效果。
Preparation method of plasma spraying yttrium oxide coating powder
The invention provides a preparation method of yttrium oxide coating powder for plasma spraying, and belongs to the technical field of ceramic powder for thermal spraying. The yttrium oxide powder with the large original crystal size is adopted as a raw material, a small amount of aluminum sol is introduced to serve as a sintering aid, the sintering temperature of the large-size original crystal yttrium oxide can be greatly reduced, the corrosion resistance of the large-size original crystal yttrium oxide powder can be reserved, the aluminum oxide spraying powder can also serve as a spraying material for semiconductor etching, and the service life of the aluminum oxide spraying powder is prolonged. Therefore, the final use effect of the powder is not affected.
本发明提供了一种等离子喷涂氧化钇涂层粉的制备方法，热喷涂用陶瓷粉体技术领域。本发明采用原晶尺寸较大的氧化钇粉体为原料，并引入少量铝溶胶做为烧结助剂，既可以大幅降低大尺寸原晶氧化钇的烧结温度，又可以保留大尺寸原晶氧化钇粉体的抗侵蚀性，氧化铝喷涂粉本身也能够做为半导体蚀刻的喷涂材料，所以不会影响粉体的最终使用效果。
Preparation method of plasma spraying yttrium oxide coating powder
一种等离子喷涂氧化钇涂层粉的制备方法
LI QISHENG (Autor:in) / LI FUSHAN (Autor:in) / LIU ZHAOHENG (Autor:in) / LIU YAHUI (Autor:in) / LIU GUANQING (Autor:in)
09.12.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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