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Method for connecting SiC ceramic through combination of plasma surface etching and glass ceramic, ceramic connecting piece prepared through method and application of ceramic connecting piece
The invention belongs to the technical field of ceramic connection, and discloses a method for connecting SiC ceramic by combining plasma surface etching with glass ceramic and application. The method comprises the following steps: carrying out ball milling and mixing on CaO-Al2O3-SiO2 and a metal oxide, drying, smelting at 1000-1500 DEG C, taking out, carrying out water quenching to obtain a crystal block, and carrying out ball milling and drying on the crystal block to obtain the glass ceramic powder. The method comprises the following steps: ultrasonically mixing glass ceramic powder and a solvent to prepare connecting slurry, and coating the connecting slurry on a brush-shaped connecting surface formed on the surface of SiC ceramic subjected to plasma etching pretreatment to obtain a prefabricated connecting piece; and heating to 1300-1500 DEG C in an inert atmosphere or a vacuum environment, and connecting under the pressure of 10-30 MPa to obtain the SiC ceramic connecting piece. The SiC ceramic connecting piece has the excellent characteristics of high temperature resistance, high connecting strength, good air tightness, oxidation resistance and the like, and can be widely applied to the fields of electronic devices, chemical industry, military industry and heat exchange device packaging.
本发明属于陶瓷连接技术领域，公开了一种等离子表面刻蚀结合玻璃陶瓷连接SiC陶瓷的方法和应用。该方法是将CaO‑Al2O3‑SiO2和金属氧化物球磨混合后干燥，在1000～1500℃下熔炼，完成后取出水淬，得到结晶块，将其球磨，干燥后得到玻璃陶瓷粉体。将玻璃陶瓷粉体和溶剂超声混合制得连接浆料涂覆于等离子刻蚀预处理的SiC陶瓷的表面形成的刷状连接面，得到预制连接件；在惰性气氛或者真空环境中升温至1300～1500℃，压力为10～30MPa进行连接，制得SiC陶瓷连接件。该SiC陶瓷连接件具有耐高温，连接强度高，气密性良好和抗氧化等优良特性，可广泛应用于电子器件、化工、军工和换热器件封装领域。
Method for connecting SiC ceramic through combination of plasma surface etching and glass ceramic, ceramic connecting piece prepared through method and application of ceramic connecting piece
The invention belongs to the technical field of ceramic connection, and discloses a method for connecting SiC ceramic by combining plasma surface etching with glass ceramic and application. The method comprises the following steps: carrying out ball milling and mixing on CaO-Al2O3-SiO2 and a metal oxide, drying, smelting at 1000-1500 DEG C, taking out, carrying out water quenching to obtain a crystal block, and carrying out ball milling and drying on the crystal block to obtain the glass ceramic powder. The method comprises the following steps: ultrasonically mixing glass ceramic powder and a solvent to prepare connecting slurry, and coating the connecting slurry on a brush-shaped connecting surface formed on the surface of SiC ceramic subjected to plasma etching pretreatment to obtain a prefabricated connecting piece; and heating to 1300-1500 DEG C in an inert atmosphere or a vacuum environment, and connecting under the pressure of 10-30 MPa to obtain the SiC ceramic connecting piece. The SiC ceramic connecting piece has the excellent characteristics of high temperature resistance, high connecting strength, good air tightness, oxidation resistance and the like, and can be widely applied to the fields of electronic devices, chemical industry, military industry and heat exchange device packaging.
本发明属于陶瓷连接技术领域，公开了一种等离子表面刻蚀结合玻璃陶瓷连接SiC陶瓷的方法和应用。该方法是将CaO‑Al2O3‑SiO2和金属氧化物球磨混合后干燥，在1000～1500℃下熔炼，完成后取出水淬，得到结晶块，将其球磨，干燥后得到玻璃陶瓷粉体。将玻璃陶瓷粉体和溶剂超声混合制得连接浆料涂覆于等离子刻蚀预处理的SiC陶瓷的表面形成的刷状连接面，得到预制连接件；在惰性气氛或者真空环境中升温至1300～1500℃，压力为10～30MPa进行连接，制得SiC陶瓷连接件。该SiC陶瓷连接件具有耐高温，连接强度高，气密性良好和抗氧化等优良特性，可广泛应用于电子器件、化工、军工和换热器件封装领域。
Method for connecting SiC ceramic through combination of plasma surface etching and glass ceramic, ceramic connecting piece prepared through method and application of ceramic connecting piece
一种等离子表面刻蚀结合玻璃陶瓷连接SiC陶瓷的方法及其制得的陶瓷连接件和应用
SU LINGFENG (Autor:in) / GUO WEIMING (Autor:in) / HE SHENGJIN (Autor:in) / CHEN XIUBING (Autor:in) / ZHAN CHUANGTIAN (Autor:in) / LIN HUATAI (Autor:in)
16.05.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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