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Preparation method of yttrium oxide coating on inner wall of ceramic crucible
The invention provides a preparation method of an yttrium oxide coating on the inner wall of a ceramic crucible, and relates to the technical field of coating preparation. The preparation method of the yttrium oxide coating on the inner wall of the ceramic crucible comprises the following steps: mixing yttrium oxide powder, polyethylene glycol, polyvinyl alcohol and water, and heating and stirring to obtain slurry; coating the slurry on the inner wall of a ceramic crucible by utilizing a centrifugal spin-coating process, and baking to obtain a pre-coating layer; the pre-coating layer is carbonized, and a carbonized coating layer is obtained; and sintering the carbonized coating to obtain the yttrium oxide coating. The method is suitable for the ceramic crucible with the large length-diameter ratio, and the prepared yttrium oxide coating is smooth in surface, uniform in thickness distribution, high in binding force with the crucible and not prone to falling off under the large temperature gradient.
本发明提供了一种陶瓷坩埚内壁氧化钇涂层的制备方法,涉及涂层制备技术领域。本发明提供的陶瓷坩埚内壁氧化钇涂层的制备方法,包括以下步骤:将氧化钇粉末、聚乙二醇、聚乙烯醇和水混合,进行加热搅拌,得到浆料;利用离心旋涂工艺,将所述浆料涂覆在陶瓷坩埚内壁上,进行烘烤,得到预涂层;将所述预涂层进行碳化,得到碳化涂层;将所述碳化涂层进行烧结,得到氧化钇涂层。本发明适用于大长径比的陶瓷坩埚,而且制备的氧化钇涂层表面平整,厚度分布均匀,与坩埚的结合力较强,在大温度梯度下不易脱落。
Preparation method of yttrium oxide coating on inner wall of ceramic crucible
The invention provides a preparation method of an yttrium oxide coating on the inner wall of a ceramic crucible, and relates to the technical field of coating preparation. The preparation method of the yttrium oxide coating on the inner wall of the ceramic crucible comprises the following steps: mixing yttrium oxide powder, polyethylene glycol, polyvinyl alcohol and water, and heating and stirring to obtain slurry; coating the slurry on the inner wall of a ceramic crucible by utilizing a centrifugal spin-coating process, and baking to obtain a pre-coating layer; the pre-coating layer is carbonized, and a carbonized coating layer is obtained; and sintering the carbonized coating to obtain the yttrium oxide coating. The method is suitable for the ceramic crucible with the large length-diameter ratio, and the prepared yttrium oxide coating is smooth in surface, uniform in thickness distribution, high in binding force with the crucible and not prone to falling off under the large temperature gradient.
本发明提供了一种陶瓷坩埚内壁氧化钇涂层的制备方法,涉及涂层制备技术领域。本发明提供的陶瓷坩埚内壁氧化钇涂层的制备方法,包括以下步骤:将氧化钇粉末、聚乙二醇、聚乙烯醇和水混合,进行加热搅拌,得到浆料;利用离心旋涂工艺,将所述浆料涂覆在陶瓷坩埚内壁上,进行烘烤,得到预涂层;将所述预涂层进行碳化,得到碳化涂层;将所述碳化涂层进行烧结,得到氧化钇涂层。本发明适用于大长径比的陶瓷坩埚,而且制备的氧化钇涂层表面平整,厚度分布均匀,与坩埚的结合力较强,在大温度梯度下不易脱落。
Preparation method of yttrium oxide coating on inner wall of ceramic crucible
一种陶瓷坩埚内壁氧化钇涂层的制备方法
RUAN YING (Autor:in) / SUN CHONGHAO (Autor:in) / WEI BINGBO (Autor:in)
21.11.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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