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Li3Mg2TiO5F microwave dielectric ceramic material for LTCC (low temperature co-fired ceramic) and preparation method thereof
The invention belongs to the field of electronic information functional materials and microelectronic devices, and particularly provides a Li3Mg2TiO5F microwave dielectric ceramic material for LTCC (Low Temperature Co-Fired Ceramic) and a preparation method of the Li3Mg2TiO5F microwave dielectric ceramic material, which are applied to the fields of microwave dielectric substrates, integrated substrates, microwave antennas, microwave filters and the like in a wireless communication technology. The Li3Mg2TiO5F solid solution ceramic material is formed by LiF and Li2Mg2TiO5, lithium volatilization and reduction of tetravalent titanium ions are effectively inhibited, the sintering temperature is reduced to be lower than the melting point of a silver electrode, low-temperature sintering of 700-950 DEG C is achieved, and therefore application of LTCC is met; meanwhile, the microwave dielectric ceramic material provided by the invention also has excellent microwave dielectric properties: the relative dielectric constant epsilon r is 13.0-15.0, the quality factor Q * f is 110000 GHz-160000 GHz, the temperature coefficient of resonance frequency tau f is-15 to-40 ppm/DEG C, and an effective solution is provided for high-frequency, light-weight and portable development of microwave electronic components.
本发明属于电子信息功能材料及微电子器件领域，具体提供一种LTCC用Li3Mg2TiO5F微波介质陶瓷材料及其制备方法，应用于无线通信技术微波介质基板、集成基板、微波天线和微波滤波器等领域。本发明通过LiF与Li2Mg2TiO5形成Li3Mg2TiO5F固溶体陶瓷材料，有效抑制锂挥发以及四价钛离子的还原，并将烧结温度降至银电极熔点以下，实现700℃～950℃的低温烧结，从而满足LTCC的应用；同时，本发明提供的微波介质陶瓷材料还具有优异的微波介电性能：相对介电常数εr为13.0～15.0，品质因数Q×f为110000GHz～160000GHz，谐振频率温度系数τf为‑15～‑40ppm/℃，为微波电子元器件向高频化、轻量化、便携化发展提供了一种有效的解决方案。
Li3Mg2TiO5F microwave dielectric ceramic material for LTCC (low temperature co-fired ceramic) and preparation method thereof
The invention belongs to the field of electronic information functional materials and microelectronic devices, and particularly provides a Li3Mg2TiO5F microwave dielectric ceramic material for LTCC (Low Temperature Co-Fired Ceramic) and a preparation method of the Li3Mg2TiO5F microwave dielectric ceramic material, which are applied to the fields of microwave dielectric substrates, integrated substrates, microwave antennas, microwave filters and the like in a wireless communication technology. The Li3Mg2TiO5F solid solution ceramic material is formed by LiF and Li2Mg2TiO5, lithium volatilization and reduction of tetravalent titanium ions are effectively inhibited, the sintering temperature is reduced to be lower than the melting point of a silver electrode, low-temperature sintering of 700-950 DEG C is achieved, and therefore application of LTCC is met; meanwhile, the microwave dielectric ceramic material provided by the invention also has excellent microwave dielectric properties: the relative dielectric constant epsilon r is 13.0-15.0, the quality factor Q * f is 110000 GHz-160000 GHz, the temperature coefficient of resonance frequency tau f is-15 to-40 ppm/DEG C, and an effective solution is provided for high-frequency, light-weight and portable development of microwave electronic components.
本发明属于电子信息功能材料及微电子器件领域，具体提供一种LTCC用Li3Mg2TiO5F微波介质陶瓷材料及其制备方法，应用于无线通信技术微波介质基板、集成基板、微波天线和微波滤波器等领域。本发明通过LiF与Li2Mg2TiO5形成Li3Mg2TiO5F固溶体陶瓷材料，有效抑制锂挥发以及四价钛离子的还原，并将烧结温度降至银电极熔点以下，实现700℃～950℃的低温烧结，从而满足LTCC的应用；同时，本发明提供的微波介质陶瓷材料还具有优异的微波介电性能：相对介电常数εr为13.0～15.0，品质因数Q×f为110000GHz～160000GHz，谐振频率温度系数τf为‑15～‑40ppm/℃，为微波电子元器件向高频化、轻量化、便携化发展提供了一种有效的解决方案。
Li3Mg2TiO5F microwave dielectric ceramic material for LTCC (low temperature co-fired ceramic) and preparation method thereof
一种LTCC用Li3Mg2TiO5F微波介质陶瓷材料及其制备方法
LIU KUI (Autor:in) / ZHANG DAINAN (Autor:in) / LEI YIDA (Autor:in) / LI JIE (Autor:in) / LIU CHENG (Autor:in) / LIAO YULONG (Autor:in) / ZHANG HUAIWU (Autor:in)
12.01.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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