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Ceramic coarsening method
The invention provides a ceramic coarsening method, which comprises the following steps of: configuring plasma gas according to ceramic characteristics, and filling a ceramic substrate with the plasma gas, the process parameters are adjusted, active plasmas ionized by the plasma gas through the high-frequency glow discharge reaction react with target components in the ceramic substrate with the initial roughness, the reaction rates of the active plasmas and different oxidation components in the ceramic substrate are different, and the ceramic substrate with the target roughness is obtained; wherein the target roughness is greater than the initial roughness. According to the embodiment of the specification, a good and uniform ceramic substrate surface is obtained, the whole ceramic substrate surface is of a honeycomb-shaped microporous structure, the surface does not affect the performance of the substrate, the bonding area is increased, and the surface has good adhesion and binding force.
本申请提供一种陶瓷粗化方法,该陶瓷粗化方法包括:根据陶瓷特性配置等离子气体,并将等离子气体充盈于初始粗糙度的陶瓷基板;调节工艺参数,等离子气体通过高频辉光放电反应电离出的活性等离子体与初始粗糙度陶瓷基板中的目标组分进行反应,活性等离子体与陶瓷基板中不同氧化组分的反应速率不同,得到目标粗糙度的陶瓷基板;其中所述目标粗糙度大于所述初始粗糙度。本说明书实施例获得良好又均匀的陶瓷基板表面,整体呈蜂窝状的微孔结构,该表面不影响基板本身性能,增加粘接面积,具有良好的附着结合力。
Ceramic coarsening method
The invention provides a ceramic coarsening method, which comprises the following steps of: configuring plasma gas according to ceramic characteristics, and filling a ceramic substrate with the plasma gas, the process parameters are adjusted, active plasmas ionized by the plasma gas through the high-frequency glow discharge reaction react with target components in the ceramic substrate with the initial roughness, the reaction rates of the active plasmas and different oxidation components in the ceramic substrate are different, and the ceramic substrate with the target roughness is obtained; wherein the target roughness is greater than the initial roughness. According to the embodiment of the specification, a good and uniform ceramic substrate surface is obtained, the whole ceramic substrate surface is of a honeycomb-shaped microporous structure, the surface does not affect the performance of the substrate, the bonding area is increased, and the surface has good adhesion and binding force.
本申请提供一种陶瓷粗化方法,该陶瓷粗化方法包括:根据陶瓷特性配置等离子气体,并将等离子气体充盈于初始粗糙度的陶瓷基板;调节工艺参数,等离子气体通过高频辉光放电反应电离出的活性等离子体与初始粗糙度陶瓷基板中的目标组分进行反应,活性等离子体与陶瓷基板中不同氧化组分的反应速率不同,得到目标粗糙度的陶瓷基板;其中所述目标粗糙度大于所述初始粗糙度。本说明书实施例获得良好又均匀的陶瓷基板表面,整体呈蜂窝状的微孔结构,该表面不影响基板本身性能,增加粘接面积,具有良好的附着结合力。
Ceramic coarsening method
陶瓷粗化方法
TAO KEWEN (Autor:in) / YU JIAYAN (Autor:in) / YIN FUZHANG (Autor:in) / LIN JIANWEI (Autor:in) / LUO XIONGKE (Autor:in)
09.02.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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