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Molybdenum metallization method of alumina ceramic
The invention relates to the technical field of ceramic metallization processing, in particular to a molybdenum metallization method of aluminum oxide ceramic. The molybdenum metallization method comprises the following steps: carrying out surface treatment on an aluminum oxide ceramic substrate; a Ti-Al-Nd-Cr2O3 alloy layer is plated through a magnetron sputtering method; preparing a metallization paste; and coating and sintering the metallization paste of the alloy-plated ceramic chip. According to the method, Ti-Al-Nd-Cr2O3 alloy powder is prepared and plated on the surface of the ceramic wafer with the clean surface through a magnetron sputtering method, in the subsequent coating and sintering process of metallization paste, more stable oxidation products are formed among oxygen atoms of titanium elements, neodymium elements and aluminum oxide, the metallization paste is tightly combined with ceramic, and therefore the metallization effect of the ceramic wafer is improved. And in cooperation with a dielectric film formed by Cr2O3 and Cr-Al spinel generated through reaction with Al element, the internal stress in the sintering process is greatly reduced, mutual diffusion migration of glass phases in ceramic and a metallization layer is promoted, the bonding capacity of the metallization paste and aluminum oxide ceramic is further improved, and the metallization layer is more compact.
本发明涉及陶瓷金属化加工技术领域，具体地说是一种氧化铝陶瓷的钼金属化方法。一种氧化铝陶瓷的钼金属化方法，包括以下步骤：氧化铝陶瓷基片的表面处理；磁控溅射法镀Ti‑Al‑Nd‑Cr2O3合金层；金属化膏剂的制备；镀合金层陶瓷片的金属化膏剂涂敷和烧结。本发明通过制备Ti‑Al‑Nd‑Cr2O3合金粉末，并通过磁控溅射法镀在表面清洁陶瓷片表面，在后续涂敷和烧结金属化膏剂的过程中，使钛元素、钕元素和氧化铝的氧原子之间形成更稳定的氧化产物，使金属化膏剂与陶瓷紧密结合，再配合Cr2O3形成的介电膜以及与Al元素反应生成的Cr‑Al尖晶石，大幅减小烧结过程的内应力，并促进陶瓷和金属化层中玻璃相的互相扩散迁移，进一步提高金属化膏剂与氧化铝陶瓷的结合能力并使金属化层更加致密。
Molybdenum metallization method of alumina ceramic
The invention relates to the technical field of ceramic metallization processing, in particular to a molybdenum metallization method of aluminum oxide ceramic. The molybdenum metallization method comprises the following steps: carrying out surface treatment on an aluminum oxide ceramic substrate; a Ti-Al-Nd-Cr2O3 alloy layer is plated through a magnetron sputtering method; preparing a metallization paste; and coating and sintering the metallization paste of the alloy-plated ceramic chip. According to the method, Ti-Al-Nd-Cr2O3 alloy powder is prepared and plated on the surface of the ceramic wafer with the clean surface through a magnetron sputtering method, in the subsequent coating and sintering process of metallization paste, more stable oxidation products are formed among oxygen atoms of titanium elements, neodymium elements and aluminum oxide, the metallization paste is tightly combined with ceramic, and therefore the metallization effect of the ceramic wafer is improved. And in cooperation with a dielectric film formed by Cr2O3 and Cr-Al spinel generated through reaction with Al element, the internal stress in the sintering process is greatly reduced, mutual diffusion migration of glass phases in ceramic and a metallization layer is promoted, the bonding capacity of the metallization paste and aluminum oxide ceramic is further improved, and the metallization layer is more compact.
本发明涉及陶瓷金属化加工技术领域，具体地说是一种氧化铝陶瓷的钼金属化方法。一种氧化铝陶瓷的钼金属化方法，包括以下步骤：氧化铝陶瓷基片的表面处理；磁控溅射法镀Ti‑Al‑Nd‑Cr2O3合金层；金属化膏剂的制备；镀合金层陶瓷片的金属化膏剂涂敷和烧结。本发明通过制备Ti‑Al‑Nd‑Cr2O3合金粉末，并通过磁控溅射法镀在表面清洁陶瓷片表面，在后续涂敷和烧结金属化膏剂的过程中，使钛元素、钕元素和氧化铝的氧原子之间形成更稳定的氧化产物，使金属化膏剂与陶瓷紧密结合，再配合Cr2O3形成的介电膜以及与Al元素反应生成的Cr‑Al尖晶石，大幅减小烧结过程的内应力，并促进陶瓷和金属化层中玻璃相的互相扩散迁移，进一步提高金属化膏剂与氧化铝陶瓷的结合能力并使金属化层更加致密。
Molybdenum metallization method of alumina ceramic
一种氧化铝陶瓷的钼金属化方法
LIU-XIE BAIJING (Autor:in)
13.02.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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