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A grid floor plate with special specification comprises a top plate and a rib structure, the rib structure and the top plate are integrally formed and cast by adopting aluminum alloy, and a plurality of through holes are formed in the top plate to form more than 50% of ventilation quantity, so that the requirement of semiconductor process cleanliness can be met.
一种特规格栅地板,包含有天板及肋骨结构,以令该肋骨结构与该天板采用铝合金一体成型铸造,其中,该天板上形成有多个贯穿的穿孔,以形成50%以上的通风量,故能满足半导体制程清净度的需求。
A grid floor plate with special specification comprises a top plate and a rib structure, the rib structure and the top plate are integrally formed and cast by adopting aluminum alloy, and a plurality of through holes are formed in the top plate to form more than 50% of ventilation quantity, so that the requirement of semiconductor process cleanliness can be met.
一种特规格栅地板,包含有天板及肋骨结构,以令该肋骨结构与该天板采用铝合金一体成型铸造,其中,该天板上形成有多个贯穿的穿孔,以形成50%以上的通风量,故能满足半导体制程清净度的需求。
Special-specification grid floor plate
特规格栅地板
HUANG JIANDE (Autor:in)
22.03.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
E04F
FINISHING WORK ON BUILDINGS, e.g. STAIRS, FLOORS
,
Ausbau von Bauwerken, z.B. Treppen, Fußböden
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