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LTCC high Curie temperature NiZn ferrite substrate material and preparation method thereof
The invention belongs to the field of electronic information functional materials and microelectronic devices, relates to a microwave ferrite material, and particularly provides an LTCC (Low Temperature Co-Fired Ceramic) high Curie temperature NiZn ferrite substrate material and a preparation method thereof. The low-temperature sintered NiCuZn ferrite substrate material is used for overcoming the defects that an existing low-temperature sintered NiCuZn ferrite substrate material is low in Curie temperature, high in microwave magnetic loss and dielectric loss, low in saturation magnetization intensity and dielectric constant and the like. The Cu-doped NiZn ferrite with the high Ni/Zn ratio is used as a main material, the Bi2O3-CuO composite eutectic mixture is used as an auxiliary material, and the Cu-doped NiZn ferrite and the Bi2O3-CuO composite eutectic mixture are co-fired at low temperature to form the substrate material, so that the substrate material not only has lower sintering temperature (-900 DEG C), but also has better heat resistance and heat resistance. And meanwhile, the ceramic has excellent microwave characteristics of high Curie temperature (-302 DEG C), low ferromagnetic resonance line width (-100Oe), low dielectric loss (loss tangent value-8 * 10 <-4 >) and high saturation magnetization (-4959 Guass), not only meets the LTCC (Low Temperature Co-Fired Ceramic) process requirements, but also has excellent magnetic performance of a key substrate material required by a microwave ferrite device.
本发明属于电子信息功能材料及微电子器件领域,涉及微波铁氧体材料,具体提供一种LTCC高居里温度NiZn铁氧体基板材料及其制备方法,用以解决现有低温烧结NiCuZn铁氧体基板材料存在的居里温度较低、微波磁损耗与介电损耗偏高、饱和磁化强度与介电常数偏低等缺陷;本发明以Cu掺杂的高Ni/Zn比NiZn铁氧体作为主料,以Bi2O3‑CuO复合低共熔混合物作为辅料,二者低温共烧形成基板材料,不仅具有较低的烧结温度(~900℃),同时还具有优异的微波特性:高的居里温度(~302℃)、低铁磁共振线宽(~100Oe)、低介电损耗(损耗正切值~8×10‑4)以及高饱和磁化强度(~4959Guass),既满足了LTCC工艺要求,又具备微波铁氧体器件所需关键基板材料的优良磁性能。
LTCC high Curie temperature NiZn ferrite substrate material and preparation method thereof
The invention belongs to the field of electronic information functional materials and microelectronic devices, relates to a microwave ferrite material, and particularly provides an LTCC (Low Temperature Co-Fired Ceramic) high Curie temperature NiZn ferrite substrate material and a preparation method thereof. The low-temperature sintered NiCuZn ferrite substrate material is used for overcoming the defects that an existing low-temperature sintered NiCuZn ferrite substrate material is low in Curie temperature, high in microwave magnetic loss and dielectric loss, low in saturation magnetization intensity and dielectric constant and the like. The Cu-doped NiZn ferrite with the high Ni/Zn ratio is used as a main material, the Bi2O3-CuO composite eutectic mixture is used as an auxiliary material, and the Cu-doped NiZn ferrite and the Bi2O3-CuO composite eutectic mixture are co-fired at low temperature to form the substrate material, so that the substrate material not only has lower sintering temperature (-900 DEG C), but also has better heat resistance and heat resistance. And meanwhile, the ceramic has excellent microwave characteristics of high Curie temperature (-302 DEG C), low ferromagnetic resonance line width (-100Oe), low dielectric loss (loss tangent value-8 * 10 <-4 >) and high saturation magnetization (-4959 Guass), not only meets the LTCC (Low Temperature Co-Fired Ceramic) process requirements, but also has excellent magnetic performance of a key substrate material required by a microwave ferrite device.
本发明属于电子信息功能材料及微电子器件领域,涉及微波铁氧体材料,具体提供一种LTCC高居里温度NiZn铁氧体基板材料及其制备方法,用以解决现有低温烧结NiCuZn铁氧体基板材料存在的居里温度较低、微波磁损耗与介电损耗偏高、饱和磁化强度与介电常数偏低等缺陷;本发明以Cu掺杂的高Ni/Zn比NiZn铁氧体作为主料,以Bi2O3‑CuO复合低共熔混合物作为辅料,二者低温共烧形成基板材料,不仅具有较低的烧结温度(~900℃),同时还具有优异的微波特性:高的居里温度(~302℃)、低铁磁共振线宽(~100Oe)、低介电损耗(损耗正切值~8×10‑4)以及高饱和磁化强度(~4959Guass),既满足了LTCC工艺要求,又具备微波铁氧体器件所需关键基板材料的优良磁性能。
LTCC high Curie temperature NiZn ferrite substrate material and preparation method thereof
一种LTCC高居里温度NiZn铁氧体基板材料及其制备方法
JIA LIJUN (Autor:in) / ZENG TIANTIAN (Autor:in) / CHEN YANCHUAN (Autor:in)
05.04.2024
Patent
Elektronische Ressource
Chinesisch
Power-type low-temperature sintered NiZn ferrite material and preparation method thereof
Europäisches Patentamt | 2015
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