Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Cesium-tungsten bronze ceramic target material for preparing near-infrared light shielding film and preparation method of cesium-tungsten bronze ceramic target material
The invention discloses a cesium-tungsten bronze ceramic target material for preparing a near-infrared light shielding film and a preparation method of the cesium-tungsten bronze ceramic target material. The preparation method comprises the following steps: weighing a set amount of cesium tungsten bronze powder; spreading a layer of graphite paper or spraying a layer of boron nitride spray in a hot pressing mold, and then spreading a layer of anti-pollution material; the cesium-tungsten bronze powder is put into a hot-pressing mold to be compacted, the hot-pressing mold is sealed, and the hot-pressing mold is put into a hot-pressing sintering furnace to be pre-pressed into the cesium-tungsten bronze powder; adjusting parameters, and performing hot pressed sintering on the cesium-tungsten bronze powder to obtain a cesium-tungsten bronze sintered green body; and machining the obtained cesium-tungsten bronze sintered green body to obtain the cesium-tungsten bronze ceramic target material. The prepared cesium-tungsten bronze ceramic target material is uniform in microstructure, fine in crystal grain, uniform in component and higher than 99.9% in purity, meets the requirements of subsequent magnetron sputtering coating, and is low in cost, and a cesium-tungsten bronze film obtained through magnetron sputtering is good in near-infrared light shielding effect, high in visible light transmittance and long in service life.
本发明公开了一种用于制备近红外光屏蔽薄膜的铯钨青铜陶瓷靶材及其制备方法。该制备方法包括：称取设定量的铯钨青铜粉体；在热压模具中铺展一层石墨纸或喷涂一层氮化硼喷剂，然后再铺展一层防污染材料；将铯钨青铜粉体放入热压模具中压实，并对热压模具进行封口，放入热压烧结炉中预压制铯钨青铜粉体；调节参数，对铯钨青铜粉体进行热压烧结，得到铯钨青铜烧结坯体；将得到的铯钨青铜烧结坯体进行机加工处理，得到铯钨青铜陶瓷靶材。制备得到的铯钨青铜陶瓷靶材微观组织均匀、晶粒细小、致密度大于98％，成分均匀、纯度大于99.9％、满足后续磁控溅射镀膜的要求，成本低，磁控溅射得到的铯钨青铜薄膜近红外光屏蔽效果好，可见光透过率高，使用寿命长。
Cesium-tungsten bronze ceramic target material for preparing near-infrared light shielding film and preparation method of cesium-tungsten bronze ceramic target material
The invention discloses a cesium-tungsten bronze ceramic target material for preparing a near-infrared light shielding film and a preparation method of the cesium-tungsten bronze ceramic target material. The preparation method comprises the following steps: weighing a set amount of cesium tungsten bronze powder; spreading a layer of graphite paper or spraying a layer of boron nitride spray in a hot pressing mold, and then spreading a layer of anti-pollution material; the cesium-tungsten bronze powder is put into a hot-pressing mold to be compacted, the hot-pressing mold is sealed, and the hot-pressing mold is put into a hot-pressing sintering furnace to be pre-pressed into the cesium-tungsten bronze powder; adjusting parameters, and performing hot pressed sintering on the cesium-tungsten bronze powder to obtain a cesium-tungsten bronze sintered green body; and machining the obtained cesium-tungsten bronze sintered green body to obtain the cesium-tungsten bronze ceramic target material. The prepared cesium-tungsten bronze ceramic target material is uniform in microstructure, fine in crystal grain, uniform in component and higher than 99.9% in purity, meets the requirements of subsequent magnetron sputtering coating, and is low in cost, and a cesium-tungsten bronze film obtained through magnetron sputtering is good in near-infrared light shielding effect, high in visible light transmittance and long in service life.
本发明公开了一种用于制备近红外光屏蔽薄膜的铯钨青铜陶瓷靶材及其制备方法。该制备方法包括：称取设定量的铯钨青铜粉体；在热压模具中铺展一层石墨纸或喷涂一层氮化硼喷剂，然后再铺展一层防污染材料；将铯钨青铜粉体放入热压模具中压实，并对热压模具进行封口，放入热压烧结炉中预压制铯钨青铜粉体；调节参数，对铯钨青铜粉体进行热压烧结，得到铯钨青铜烧结坯体；将得到的铯钨青铜烧结坯体进行机加工处理，得到铯钨青铜陶瓷靶材。制备得到的铯钨青铜陶瓷靶材微观组织均匀、晶粒细小、致密度大于98％，成分均匀、纯度大于99.9％、满足后续磁控溅射镀膜的要求，成本低，磁控溅射得到的铯钨青铜薄膜近红外光屏蔽效果好，可见光透过率高，使用寿命长。
Cesium-tungsten bronze ceramic target material for preparing near-infrared light shielding film and preparation method of cesium-tungsten bronze ceramic target material
用于制备近红外光屏蔽薄膜的铯钨青铜陶瓷靶材及其制备方法
ZHANG LONGZHEN (Autor:in) / HE XIN (Autor:in) / WU XIAOCHAO (Autor:in) / LI QINGKUI (Autor:in) / WANG CHENGDUO (Autor:in) / YAO SHUGUANG (Autor:in) / HE JILIN (Autor:in)
05.04.2024
Patent
Elektronische Ressource
Chinesisch
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