Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Crucible and preparation method thereof
The invention discloses a crucible and a preparation method thereof, and relates to the technical field of silicon crystal bar preparation, the preparation method of the crucible comprises the following steps: mixing polymethylsiloxane and an organic solvent according to a mass ratio of 1: 0.6-1 to form a mixed solution; quartz powder and the mixed solution are mixed in a ball mill according to the mass ratio of 1: 50-1: 100, and a solution to be coated is formed; the solution to be coated is sprayed to the surface of a base body and dried, a polycarbosilane composite coating is formed on the surface of the base body, and the base body is made of a high-temperature-resistant ceramic material; and the dried substrate is heated, so that the polycarbosilane composite coating is oxidized to form the silicon oxide coating. According to the crucible and the preparation method thereof provided by the invention, the influence of ions of the crucible body on the silicon crystal bar can be effectively isolated, and the crucible can work at high temperature for a long time.
本申请公开了一种坩埚及其制备方法，涉及硅晶棒制备技术领域，本申请的坩埚的制备方法，包括：将聚甲基硅氧烷与有机溶剂按照质量比为1:0.6‑1混合形成混合溶液；将石英粉与混合溶液按照质量比为1:50‑1:100在球磨机内进行混合，形成待涂溶液；将待涂溶液喷涂于基体的表面并干燥，在基体表面形成聚碳硅烷复合涂层，其中基体为耐高温陶瓷材料制成；将干燥后的基体加热，使得聚碳硅烷复合涂层氧化形成氧化硅涂层。本申请提供的坩埚及其制备方法，能够有效隔绝坩埚本体的离子对硅晶棒的影响，且能够长时间在高温下工作。
Crucible and preparation method thereof
The invention discloses a crucible and a preparation method thereof, and relates to the technical field of silicon crystal bar preparation, the preparation method of the crucible comprises the following steps: mixing polymethylsiloxane and an organic solvent according to a mass ratio of 1: 0.6-1 to form a mixed solution; quartz powder and the mixed solution are mixed in a ball mill according to the mass ratio of 1: 50-1: 100, and a solution to be coated is formed; the solution to be coated is sprayed to the surface of a base body and dried, a polycarbosilane composite coating is formed on the surface of the base body, and the base body is made of a high-temperature-resistant ceramic material; and the dried substrate is heated, so that the polycarbosilane composite coating is oxidized to form the silicon oxide coating. According to the crucible and the preparation method thereof provided by the invention, the influence of ions of the crucible body on the silicon crystal bar can be effectively isolated, and the crucible can work at high temperature for a long time.
本申请公开了一种坩埚及其制备方法，涉及硅晶棒制备技术领域，本申请的坩埚的制备方法，包括：将聚甲基硅氧烷与有机溶剂按照质量比为1:0.6‑1混合形成混合溶液；将石英粉与混合溶液按照质量比为1:50‑1:100在球磨机内进行混合，形成待涂溶液；将待涂溶液喷涂于基体的表面并干燥，在基体表面形成聚碳硅烷复合涂层，其中基体为耐高温陶瓷材料制成；将干燥后的基体加热，使得聚碳硅烷复合涂层氧化形成氧化硅涂层。本申请提供的坩埚及其制备方法，能够有效隔绝坩埚本体的离子对硅晶棒的影响，且能够长时间在高温下工作。
Crucible and preparation method thereof
坩埚及其制备方法
CHEN XIANYI (Autor:in) / ZHAI CHUANXIN (Autor:in) / LI XIAOFENG (Autor:in) / WANG JIN (Autor:in)
09.04.2024
Patent
Elektronische Ressource
Chinesisch