Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of piezoelectric ceramic material with improved piezoelectric property
The invention provides a preparation method of a piezoelectric ceramic material with improved piezoelectric property, and the method comprises the following steps: providing a piezoelectric ceramic base material with a chemical formula of BaTiO3.xTiO2.yZrO2; a first piezoelectric ceramic layer is formed on the piezoelectric ceramic base material through magnetron sputtering, and the chemical formula of the first piezoelectric ceramic layer is BaTiO3.aTiO2.bZrO2; a second piezoelectric ceramic layer is formed on the first piezoelectric ceramic layer through magnetron sputtering, and the chemical formula of the second piezoelectric ceramic layer is BaTiO3.cTiO2.dZrO2; a third piezoelectric ceramic layer is formed on the second piezoelectric ceramic layer through magnetron sputtering, and the chemical formula of the third piezoelectric ceramic layer is BaTiO3.eTiO2.fZrO2; wherein, xgt; gt; cgt; e, and wherein, ylt; blt; dlt; f.
本发明提供了一种具有改进的压电性能的压电陶瓷材料的制备方法，方法包括：提供压电陶瓷基材，其中，压电陶瓷基材的化学式为BaTiO3·xTiO2·yZrO2；在压电陶瓷基材上磁控溅射形成第一压电陶瓷层，其中，第一压电陶瓷层的化学式为BaTiO3·aTiO2·bZrO2；在第一压电陶瓷层上磁控溅射形成第二压电陶瓷层，其中，第二压电陶瓷层的化学式为BaTiO3·cTiO2·dZrO2；在第二压电陶瓷层上磁控溅射形成第三压电陶瓷层，其中，第三压电陶瓷层的化学式为BaTiO3·eTiO2·fZrO2；其中，x>a>c>e，并且其中，y
Preparation method of piezoelectric ceramic material with improved piezoelectric property
The invention provides a preparation method of a piezoelectric ceramic material with improved piezoelectric property, and the method comprises the following steps: providing a piezoelectric ceramic base material with a chemical formula of BaTiO3.xTiO2.yZrO2; a first piezoelectric ceramic layer is formed on the piezoelectric ceramic base material through magnetron sputtering, and the chemical formula of the first piezoelectric ceramic layer is BaTiO3.aTiO2.bZrO2; a second piezoelectric ceramic layer is formed on the first piezoelectric ceramic layer through magnetron sputtering, and the chemical formula of the second piezoelectric ceramic layer is BaTiO3.cTiO2.dZrO2; a third piezoelectric ceramic layer is formed on the second piezoelectric ceramic layer through magnetron sputtering, and the chemical formula of the third piezoelectric ceramic layer is BaTiO3.eTiO2.fZrO2; wherein, xgt; gt; cgt; e, and wherein, ylt; blt; dlt; f.
本发明提供了一种具有改进的压电性能的压电陶瓷材料的制备方法，方法包括：提供压电陶瓷基材，其中，压电陶瓷基材的化学式为BaTiO3·xTiO2·yZrO2；在压电陶瓷基材上磁控溅射形成第一压电陶瓷层，其中，第一压电陶瓷层的化学式为BaTiO3·aTiO2·bZrO2；在第一压电陶瓷层上磁控溅射形成第二压电陶瓷层，其中，第二压电陶瓷层的化学式为BaTiO3·cTiO2·dZrO2；在第二压电陶瓷层上磁控溅射形成第三压电陶瓷层，其中，第三压电陶瓷层的化学式为BaTiO3·eTiO2·fZrO2；其中，x>a>c>e，并且其中，y
Preparation method of piezoelectric ceramic material with improved piezoelectric property
一种具有改进的压电性能的压电陶瓷材料的制备方法
YANG JIAXIN (Autor:in) / WU JIAJUN (Autor:in) / HOU JIAXING (Autor:in) / YANG HONGYU (Autor:in) / OU YUN (Autor:in)
31.05.2024
Patent
Elektronische Ressource
Chinesisch
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