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Particle dispersion toughened silicon nitride ceramic substrate and preparation method thereof
The invention relates to the field of silicon nitride ceramic substrates, and particularly discloses a particle dispersion toughened silicon nitride ceramic substrate and a preparation method thereof. The particle dispersion toughened silicon nitride ceramic substrate comprises the following raw materials in parts by weight: 80-120 parts of silicon nitride, 60-110 parts of an alcohol solvent, 5-10 parts of a binder, 5-12 parts of toughening particles, 1-5 parts of a dispersing agent, 0.5-1 part of a defoaming agent and 2-5 parts of a sintering aid, the toughening particles are prepared from molybdenum silicide, polyether-ether-ketone and aerogel according to the mass ratio of 1: (0.1 to 0.5): (0.05 to 0.1). The preparation method comprises the following steps: ball-milling and uniformly mixing the silicon nitride, the alcohol solvent and the toughening particles, adding the binder, the dispersing agent, the defoaming agent and the sintering aid, continuously ball-milling, uniformly mixing and defoaming to obtain a mixture; and carrying out tape casting, drying, isostatic pressing, cutting, glue discharging, high-temperature sintering and cooling on the mixture to obtain a finished product. The material has the advantages of high strength and good toughness.
本申请涉及氮化硅陶瓷基板领域，具体公开了一种颗粒弥散增韧氮化硅陶瓷基板及其制备方法；一种颗粒弥散增韧氮化硅陶瓷基板，包含以下重量份的原料：氮化硅80‑120份、醇溶剂60‑110份、粘结剂5‑10份、增韧颗粒5‑12份、分散剂1‑5份、消泡剂0.5‑1份、烧结助剂2‑5份；所述增韧颗粒由质量比为1:0.1‑0.5:0.05‑0.1的硅化钼、聚醚醚酮和气凝胶组成。其制备方法为：氮化硅、醇溶剂、增韧颗粒球磨混合均匀，添加粘结剂、分散剂、消泡剂、烧结助剂继续球磨，混合均匀、脱泡，得到混合料；混合料经流延成型、干燥、等静压压制、裁切、排胶、高温烧结、冷却，制得成品；具有强度高、韧性好的优点。
Particle dispersion toughened silicon nitride ceramic substrate and preparation method thereof
The invention relates to the field of silicon nitride ceramic substrates, and particularly discloses a particle dispersion toughened silicon nitride ceramic substrate and a preparation method thereof. The particle dispersion toughened silicon nitride ceramic substrate comprises the following raw materials in parts by weight: 80-120 parts of silicon nitride, 60-110 parts of an alcohol solvent, 5-10 parts of a binder, 5-12 parts of toughening particles, 1-5 parts of a dispersing agent, 0.5-1 part of a defoaming agent and 2-5 parts of a sintering aid, the toughening particles are prepared from molybdenum silicide, polyether-ether-ketone and aerogel according to the mass ratio of 1: (0.1 to 0.5): (0.05 to 0.1). The preparation method comprises the following steps: ball-milling and uniformly mixing the silicon nitride, the alcohol solvent and the toughening particles, adding the binder, the dispersing agent, the defoaming agent and the sintering aid, continuously ball-milling, uniformly mixing and defoaming to obtain a mixture; and carrying out tape casting, drying, isostatic pressing, cutting, glue discharging, high-temperature sintering and cooling on the mixture to obtain a finished product. The material has the advantages of high strength and good toughness.
本申请涉及氮化硅陶瓷基板领域，具体公开了一种颗粒弥散增韧氮化硅陶瓷基板及其制备方法；一种颗粒弥散增韧氮化硅陶瓷基板，包含以下重量份的原料：氮化硅80‑120份、醇溶剂60‑110份、粘结剂5‑10份、增韧颗粒5‑12份、分散剂1‑5份、消泡剂0.5‑1份、烧结助剂2‑5份；所述增韧颗粒由质量比为1:0.1‑0.5:0.05‑0.1的硅化钼、聚醚醚酮和气凝胶组成。其制备方法为：氮化硅、醇溶剂、增韧颗粒球磨混合均匀，添加粘结剂、分散剂、消泡剂、烧结助剂继续球磨，混合均匀、脱泡，得到混合料；混合料经流延成型、干燥、等静压压制、裁切、排胶、高温烧结、冷却，制得成品；具有强度高、韧性好的优点。
Particle dispersion toughened silicon nitride ceramic substrate and preparation method thereof
一种颗粒弥散增韧氮化硅陶瓷基板及其制备方法
LIU WEIPING (Autor:in) / CHEN ZHI (Autor:in) / TAN CHENGYE (Autor:in)
07.06.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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