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Sodium bismuth titanate based ferroelectric film and preparation method thereof
The invention discloses a preparation method of a sodium bismuth titanate-strontium titanate-bismuth manganate ferroelectric film, the chemical composition of the ferroelectric film is (1-x) Bi < 0.35 > Na < 0.35 > Sr < 0.3 > O < 3-x > BiMnO < 3 >, the molar component x is 0-0.10, and the preparation method comprises the following steps: (1) adding bismuth nitrate, sodium acetate, strontium acetate and manganese acetate into deionized water and an acetic acid solvent, and stirring at 40-90 DEG C for 5-40 minutes to obtain a solution A; (2) adding tetrabutyl titanate into a solvent of acetylacetone and ethylene glycol monomethyl ether, and stirring for 5-40 minutes to obtain a solution B; (3) mixing and stirring the solution A and the solution B for 5-40 minutes to obtain a mixed solution C; and (4) coating the Pt/Ti/SiO2/Si substrate with the mixed solution C by using a spin-coating method, and carrying out high-temperature treatment to obtain the sodium bismuth titanate-based lead-free ferroelectric film. The surface of the ferroelectric film is flat and smooth, the ferroelectric film has a typical perovskite structure, high polarization intensity and excellent piezoelectric performance, and especially the remanent polarization intensity Pr is greatly improved.
本发明公开了一种钛酸铋钠‑钛酸锶‑锰酸铋铁电薄膜的制备方法，铁电薄膜的化学组成为(1‑x)Bi0.35Na0.35Sr0.3O3‑xBiMnO3，摩尔分量x＝0‑0.10，制备方法为：①将硝酸铋、乙酸钠、乙酸锶和乙酸锰加入去离子水和乙酸溶剂中，在40‑90℃下搅拌5‑40min，得溶液A；②将钛酸四丁酯加入乙酰丙酮和乙二醇甲醚溶剂中，搅拌5‑40min，得溶液B；③将溶液A与溶液B混合搅拌5‑40min后得混合液C；④用旋涂法将混合液C涂覆在Pt/Ti/SiO2/Si基片上，高温处理后得钛酸铋钠基无铅铁电薄膜；该铁电薄膜表面平整光滑，具有典型的钙钛矿结构、很高的极化强度以及优异的压电性能，尤其大幅提高了剩余极化强度Pr。
Sodium bismuth titanate based ferroelectric film and preparation method thereof
The invention discloses a preparation method of a sodium bismuth titanate-strontium titanate-bismuth manganate ferroelectric film, the chemical composition of the ferroelectric film is (1-x) Bi < 0.35 > Na < 0.35 > Sr < 0.3 > O < 3-x > BiMnO < 3 >, the molar component x is 0-0.10, and the preparation method comprises the following steps: (1) adding bismuth nitrate, sodium acetate, strontium acetate and manganese acetate into deionized water and an acetic acid solvent, and stirring at 40-90 DEG C for 5-40 minutes to obtain a solution A; (2) adding tetrabutyl titanate into a solvent of acetylacetone and ethylene glycol monomethyl ether, and stirring for 5-40 minutes to obtain a solution B; (3) mixing and stirring the solution A and the solution B for 5-40 minutes to obtain a mixed solution C; and (4) coating the Pt/Ti/SiO2/Si substrate with the mixed solution C by using a spin-coating method, and carrying out high-temperature treatment to obtain the sodium bismuth titanate-based lead-free ferroelectric film. The surface of the ferroelectric film is flat and smooth, the ferroelectric film has a typical perovskite structure, high polarization intensity and excellent piezoelectric performance, and especially the remanent polarization intensity Pr is greatly improved.
本发明公开了一种钛酸铋钠‑钛酸锶‑锰酸铋铁电薄膜的制备方法，铁电薄膜的化学组成为(1‑x)Bi0.35Na0.35Sr0.3O3‑xBiMnO3，摩尔分量x＝0‑0.10，制备方法为：①将硝酸铋、乙酸钠、乙酸锶和乙酸锰加入去离子水和乙酸溶剂中，在40‑90℃下搅拌5‑40min，得溶液A；②将钛酸四丁酯加入乙酰丙酮和乙二醇甲醚溶剂中，搅拌5‑40min，得溶液B；③将溶液A与溶液B混合搅拌5‑40min后得混合液C；④用旋涂法将混合液C涂覆在Pt/Ti/SiO2/Si基片上，高温处理后得钛酸铋钠基无铅铁电薄膜；该铁电薄膜表面平整光滑，具有典型的钙钛矿结构、很高的极化强度以及优异的压电性能，尤其大幅提高了剩余极化强度Pr。
Sodium bismuth titanate based ferroelectric film and preparation method thereof
一种钛酸铋钠基铁电薄膜及其制备方法
PAN KAI (Autor:in) / HUANG WENQIANG (Autor:in) / ZHANG SHIJUN (Autor:in) / ZHAO CHANGXING (Autor:in) / XIE SHUHONG (Autor:in) / LIU YUNYA (Autor:in) / SHANDONG LIANG (Autor:in)
11.06.2024
Patent
Elektronische Ressource
Chinesisch
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