High-temperature-resistant corrosion-resistant full-temperature-range measurement ceramic temperature sensor and preparation method thereof: Fid-Bau Portal

High-temperature-resistant corrosion-resistant full-temperature-range measurement ceramic temperature sensor and preparation method thereof

CHEN NINA / ZHANG NAIWEN / HUANG JIAHUI

Abstract

The invention discloses a high-temperature-resistant corrosion-resistant full-temperature-range measurement ceramic temperature sensor and a preparation method thereof, and belongs to the technical field of temperature sensors, the high-temperature-resistant corrosion-resistant full-temperature-range measurement ceramic temperature sensor comprises an ultrasonic sensing ceramic rod, and one end of the ultrasonic sensing ceramic rod is sequentially provided with a crystal orientation induction layer, a piezoelectric functional layer, a protective layer and a high-temperature-resistant electrode layer from inside to outside. And the piezoelectric functional layer is a (002) oriented columnar crystal AlScCrN coating layer. The temperature sensor has the advantages that the ceramic material is used as the temperature sensor to be applied to temperature detection, the defects that a traditional thermocouple is low in response speed and cannot work in a corrosion environment are overcome, the adopted ceramic temperature sensor can work from low liquid nitrogen temperature to high temperature of 2500 DEG C, and temperature measurement in a wide temperature range is achieved for the first time.

本发明公开了一种耐高温抗腐蚀全温域测量陶瓷温度传感器及其制备方法，属于温度传感器技术领域，包括超声传感陶瓷棒，所述超声传感陶瓷棒一端由内至外依次设置有结晶取向诱导层、压电功能层、保护层、耐高温电极层，所述压电功能层为(002)取向的柱状晶AlScCrN涂层。本发明的有益效果是：将陶瓷材料作为温度传感器应用于温度检测，避免了传统热电偶响应速度慢，不能在腐蚀环境中工作的缺点，采用的陶瓷温度传感器可以从液氮温度的低温工作到2500℃的高温，首次实现宽温域范围的温度测量。

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