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Doped cuprous oxide target material and preparation method of cuprous oxide battery
The invention provides a doped cuprous oxide target material and a preparation method thereof, and a preparation method of a cuprous oxide battery. The composition of the doped cuprous oxide target material is Cu < 1-x > MxOy, and M is a doped divalent element and is selected from one or more than two of Zn, Mg, Cd, Ca and Hg. The element to be doped and the cuprous oxide are prepared into the multi-element target material according to a certain proportion, the multi-element target material can achieve accurate control over the doped element, and the uniformity of the prepared cuprous oxide film layer is guaranteed. The preparation method of the cuprous oxide battery is realized by utilizing sputtering of the multi-element target material, the process flow is simplified, the obtained cuprous oxide film layer is uniform, and the purpose of improving the carrier concentration and the electron mobility of the cuprous oxide battery can be realized.
本申请提供一种掺杂的氧化亚铜靶材及其制备方法,以及一种氧化亚铜电池的制备方法。掺杂的氧化亚铜靶材组成为Cu1‑xMxOy,其中M为掺杂的二价元素,选自Zn、Mg、Cd、Ca、Hg中的一种或两种以上。本申请将待掺杂的元素与氧化亚铜按照一定比例制备成多元靶材,该多元靶材可以实现掺杂元素的精确控制,并保证制备得到的氧化亚铜膜层的均一性。本申请的氧化亚铜电池的制备方法利用多元靶材的溅射实现,简化了工艺流程,得到的氧化亚铜膜层均一,并且可以实现改善氧化亚铜电池载流子浓度及电子迁移率的目的。
Doped cuprous oxide target material and preparation method of cuprous oxide battery
The invention provides a doped cuprous oxide target material and a preparation method thereof, and a preparation method of a cuprous oxide battery. The composition of the doped cuprous oxide target material is Cu < 1-x > MxOy, and M is a doped divalent element and is selected from one or more than two of Zn, Mg, Cd, Ca and Hg. The element to be doped and the cuprous oxide are prepared into the multi-element target material according to a certain proportion, the multi-element target material can achieve accurate control over the doped element, and the uniformity of the prepared cuprous oxide film layer is guaranteed. The preparation method of the cuprous oxide battery is realized by utilizing sputtering of the multi-element target material, the process flow is simplified, the obtained cuprous oxide film layer is uniform, and the purpose of improving the carrier concentration and the electron mobility of the cuprous oxide battery can be realized.
本申请提供一种掺杂的氧化亚铜靶材及其制备方法,以及一种氧化亚铜电池的制备方法。掺杂的氧化亚铜靶材组成为Cu1‑xMxOy,其中M为掺杂的二价元素,选自Zn、Mg、Cd、Ca、Hg中的一种或两种以上。本申请将待掺杂的元素与氧化亚铜按照一定比例制备成多元靶材,该多元靶材可以实现掺杂元素的精确控制,并保证制备得到的氧化亚铜膜层的均一性。本申请的氧化亚铜电池的制备方法利用多元靶材的溅射实现,简化了工艺流程,得到的氧化亚铜膜层均一,并且可以实现改善氧化亚铜电池载流子浓度及电子迁移率的目的。
Doped cuprous oxide target material and preparation method of cuprous oxide battery
掺杂的氧化亚铜靶材以及氧化亚铜电池的制备方法
JIA YONG (Autor:in) / DONG XIN (Autor:in) / LI JIANJUN (Autor:in) / HE BO (Autor:in)
16.08.2024
Patent
Elektronische Ressource
Chinesisch
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