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Piezoelectric pressure sensor based on piezoelectric ceramic material with high piezoelectric coefficient and high Curie temperature
The invention discloses a piezoelectric pressure sensor based on a piezoelectric ceramic material with a high piezoelectric coefficient and a high Curie temperature, and relates to the field of pressure sensors. The sensor structure comprises a shell and a sensitive core body, the shell of the sensor is composed of an upper cover and a shell body, and the sensitive core body of the piezoelectric pressure sensor is prepared by a piezoelectric ceramic piece stacking method. The chemical composition of a piezoelectric ceramic piece material used by the sensitive core body is 0.355 BiScO3-0.645 PbTiO3 + x Nd2O3 (x is more than or equal to 0.01 and less than or equal to 0.04), the piezoelectric coefficient of the piezoelectric ceramic piece material is 425-567 pC/N, the Curie temperature is 300-400 DEG C, and the piezoelectric ceramic piece material has high Curie temperature and high piezoelectric coefficient. The sensitive core body is composed of a piezoelectric ceramic piece, an electrode piece, a pressure transmission mass block and a compensation mass block. The piezoelectric ceramic material with the high piezoelectric coefficient and the high Curie temperature is adopted as a core component of the sensor and is combined with a reasonably-designed sensor structure, so that the piezoelectric pressure sensor is high in frequency response, high in sensitivity and wide in working temperature range; and the designed and prepared sensor has active acceleration compensation and vibration compensation effects.
本发明公开了一种基于高压电系数和高居里温度的压电陶瓷材料的压电式压力传感器，涉及压力传感器领域。该传感器结构包括外壳和敏感芯体，其中传感器的外壳由上盖和壳体组成，使用压电陶瓷片堆叠的方法制备压电式压力传感器的敏感芯体。敏感芯体使用的压电陶瓷片材料的化学组成为0.355BiScO3‑0.645PbTiO3+x Nd2O3(0.01≤x≤0.04)，其压电系数为425～567pC/N，居里温度为300～400℃，兼具高居里温度和高压电系数。该敏感芯体由压电陶瓷片、电极片、传压质量块、补偿质量块组成。通过采用这种兼具高压电系数与高居里温度的压电陶瓷材料作为传感器核心部件，与合理设计的传感器结构相结合，使得该压电式压力传感器频响快，灵敏度高，工作温度范围宽，而且设计制备的传感器具有主动加速度补偿和振动补偿作用。
Piezoelectric pressure sensor based on piezoelectric ceramic material with high piezoelectric coefficient and high Curie temperature
The invention discloses a piezoelectric pressure sensor based on a piezoelectric ceramic material with a high piezoelectric coefficient and a high Curie temperature, and relates to the field of pressure sensors. The sensor structure comprises a shell and a sensitive core body, the shell of the sensor is composed of an upper cover and a shell body, and the sensitive core body of the piezoelectric pressure sensor is prepared by a piezoelectric ceramic piece stacking method. The chemical composition of a piezoelectric ceramic piece material used by the sensitive core body is 0.355 BiScO3-0.645 PbTiO3 + x Nd2O3 (x is more than or equal to 0.01 and less than or equal to 0.04), the piezoelectric coefficient of the piezoelectric ceramic piece material is 425-567 pC/N, the Curie temperature is 300-400 DEG C, and the piezoelectric ceramic piece material has high Curie temperature and high piezoelectric coefficient. The sensitive core body is composed of a piezoelectric ceramic piece, an electrode piece, a pressure transmission mass block and a compensation mass block. The piezoelectric ceramic material with the high piezoelectric coefficient and the high Curie temperature is adopted as a core component of the sensor and is combined with a reasonably-designed sensor structure, so that the piezoelectric pressure sensor is high in frequency response, high in sensitivity and wide in working temperature range; and the designed and prepared sensor has active acceleration compensation and vibration compensation effects.
本发明公开了一种基于高压电系数和高居里温度的压电陶瓷材料的压电式压力传感器，涉及压力传感器领域。该传感器结构包括外壳和敏感芯体，其中传感器的外壳由上盖和壳体组成，使用压电陶瓷片堆叠的方法制备压电式压力传感器的敏感芯体。敏感芯体使用的压电陶瓷片材料的化学组成为0.355BiScO3‑0.645PbTiO3+x Nd2O3(0.01≤x≤0.04)，其压电系数为425～567pC/N，居里温度为300～400℃，兼具高居里温度和高压电系数。该敏感芯体由压电陶瓷片、电极片、传压质量块、补偿质量块组成。通过采用这种兼具高压电系数与高居里温度的压电陶瓷材料作为传感器核心部件，与合理设计的传感器结构相结合，使得该压电式压力传感器频响快，灵敏度高，工作温度范围宽，而且设计制备的传感器具有主动加速度补偿和振动补偿作用。
Piezoelectric pressure sensor based on piezoelectric ceramic material with high piezoelectric coefficient and high Curie temperature
一种基于高压电系数和高居里温度的压电陶瓷材料的压电式压力传感器
WANG LINGHANG (Autor:in) / SHI CHENYU (Autor:in) / LI PENG (Autor:in)
27.08.2024
Patent
Elektronische Ressource
Chinesisch
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