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Silicide high-temperature ceramic coating for oxidation/ablation protection and preparation method of silicide high-temperature ceramic coating
The invention discloses a silicide high-temperature ceramic coating for oxidation/ablation protection and a preparation method of the silicide high-temperature ceramic coating, and belongs to the technical field of preparation of high-temperature protective coatings. The method comprises the following steps: putting a carbon matrix material into a reaction chamber of a chemical vapor deposition furnace, then vacuumizing, putting transition metal element chloride into a solid precursor gasification furnace, and heating and gasifying the transition metal element chloride after the chemical vapor deposition furnace reaches a set temperature; the SiCl4 tank is heated, carrier gas H2 is introduced into the SiCl4 tank, the carrier gas H2 is introduced into the solid precursor gasification furnace, gasified SiCl4 and transition metal element chloride are brought into a gas mixing tank by the carrier gas H2 to be fully mixed, then the mixture is introduced into a reaction chamber of the chemical vapor deposition furnace, and argon is introduced; and depositing on the surface of the carbon matrix material, stopping introducing gas after deposition is completed, cooling under the protection of argon, and naturally cooling to room temperature along with the furnace to obtain the silicide high-temperature ceramic coating. According to the invention, a chemical vapor deposition technology is adopted, and the silicide ceramic protective coating is prepared under a specific deposition system of SiCl4-transition metal element chloride-H2-Ar.
本发明公开了一种用于氧化/烧蚀防护的硅化物高温陶瓷涂层及其制备方法，属于高温防护涂层制备技术领域。该方法如下：将碳基体材料放入化学气相沉积炉的反应室内，后抽真空处理，将过渡金属元素氯化物置于固态前驱体气化炉内，待化学气相沉积炉达到设定温度后，对过渡金属元素氯化物进行加热气化；加热SiCl4罐并向SiCl4罐中通入载气H2，向固态前驱体气化炉中通入载气H2，气化后的SiCl4和过渡金属元素氯化物被载气H2带入到混气罐中充分混合，后通入化学气相沉积炉的反应室中，通入氩气；在碳基体材料的表面进行沉积，沉积完成后关闭通入气体，在氩气保护下降温后随炉自然冷却至室温，获得硅化物高温陶瓷涂层。本发明采用化学气相沉积技术，在SiCl4‑过渡金属元素氯化物‑H2‑Ar这一特定的沉积体系下制备硅化物陶瓷防护涂层。
Silicide high-temperature ceramic coating for oxidation/ablation protection and preparation method of silicide high-temperature ceramic coating
The invention discloses a silicide high-temperature ceramic coating for oxidation/ablation protection and a preparation method of the silicide high-temperature ceramic coating, and belongs to the technical field of preparation of high-temperature protective coatings. The method comprises the following steps: putting a carbon matrix material into a reaction chamber of a chemical vapor deposition furnace, then vacuumizing, putting transition metal element chloride into a solid precursor gasification furnace, and heating and gasifying the transition metal element chloride after the chemical vapor deposition furnace reaches a set temperature; the SiCl4 tank is heated, carrier gas H2 is introduced into the SiCl4 tank, the carrier gas H2 is introduced into the solid precursor gasification furnace, gasified SiCl4 and transition metal element chloride are brought into a gas mixing tank by the carrier gas H2 to be fully mixed, then the mixture is introduced into a reaction chamber of the chemical vapor deposition furnace, and argon is introduced; and depositing on the surface of the carbon matrix material, stopping introducing gas after deposition is completed, cooling under the protection of argon, and naturally cooling to room temperature along with the furnace to obtain the silicide high-temperature ceramic coating. According to the invention, a chemical vapor deposition technology is adopted, and the silicide ceramic protective coating is prepared under a specific deposition system of SiCl4-transition metal element chloride-H2-Ar.
本发明公开了一种用于氧化/烧蚀防护的硅化物高温陶瓷涂层及其制备方法，属于高温防护涂层制备技术领域。该方法如下：将碳基体材料放入化学气相沉积炉的反应室内，后抽真空处理，将过渡金属元素氯化物置于固态前驱体气化炉内，待化学气相沉积炉达到设定温度后，对过渡金属元素氯化物进行加热气化；加热SiCl4罐并向SiCl4罐中通入载气H2，向固态前驱体气化炉中通入载气H2，气化后的SiCl4和过渡金属元素氯化物被载气H2带入到混气罐中充分混合，后通入化学气相沉积炉的反应室中，通入氩气；在碳基体材料的表面进行沉积，沉积完成后关闭通入气体，在氩气保护下降温后随炉自然冷却至室温，获得硅化物高温陶瓷涂层。本发明采用化学气相沉积技术，在SiCl4‑过渡金属元素氯化物‑H2‑Ar这一特定的沉积体系下制备硅化物陶瓷防护涂层。
Silicide high-temperature ceramic coating for oxidation/ablation protection and preparation method of silicide high-temperature ceramic coating
一种用于氧化/烧蚀防护的硅化物高温陶瓷涂层及其制备方法
ZHANG YULEI (Autor:in) / ZHANG HAOHUI (Autor:in) / ZHANG JIAN (Autor:in) / CHEN RUICONG (Autor:in) / MING ZHIYUAN (Autor:in)
06.12.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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