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Method for preparing aluminum-doped vanadium trioxide film by sol-gel method
The invention discloses a method for preparing an aluminum-doped vanadium trioxide film by a sol-gel method, which comprises the following steps: dissolving vanadium isopropoxide and an aluminum isopropoxide solution in isopropanol, adding acetic acid, and fully and uniformly mixing to obtain sol; the sol is dropwise coated on the surface of an aluminum oxide substrate to form a film, one drop is dropped after each drop is dried, and the relative thickness of the film is controlled through different drop numbers. Putting the obtained film into a graphite boat, putting vanadium dioxide powder around the graphite boat, putting the graphite boat into an aluminum oxide square crucible, then putting the crucible into a tubular furnace, reducing the crucible into vanadium dioxide at a relatively low temperature, and then continuously heating and annealing in a reducing atmosphere to obtain the doped vanadium trioxide film. The obtained finished product is a polycrystalline film, the obtained film is uniform, the high-temperature phase change of the film ranges from 250 K to 380 K, and the resistance change is 2-20 times after phase change.
本发明公开了一种溶胶‑凝胶法制备铝掺杂三氧化二钒薄膜的方法，将异丙醇钒与异丙醇铝溶液溶于异丙醇中，并加入乙酸充分混合均匀后获得溶胶；将溶胶逐滴滴涂在三氧化二铝基片表面形成薄膜，每一滴干燥后再滴下一滴，通过不同的滴数控制薄膜的相对厚度。将获得的薄膜放在石墨舟中，并在其周围放上二氧化钒粉末，将石墨舟放在氧化铝方形坩埚中，然后将坩埚放进管式炉中，先在相对低的温度中还原成二氧化钒，而后继续在还原性氛围中升温退火得到掺杂的三氧化二钒薄膜。本发明得到的成品是多晶膜，得到的薄膜均匀，薄膜高温相变在250K～380K之间，相变后电阻变化2～20倍。
Method for preparing aluminum-doped vanadium trioxide film by sol-gel method
The invention discloses a method for preparing an aluminum-doped vanadium trioxide film by a sol-gel method, which comprises the following steps: dissolving vanadium isopropoxide and an aluminum isopropoxide solution in isopropanol, adding acetic acid, and fully and uniformly mixing to obtain sol; the sol is dropwise coated on the surface of an aluminum oxide substrate to form a film, one drop is dropped after each drop is dried, and the relative thickness of the film is controlled through different drop numbers. Putting the obtained film into a graphite boat, putting vanadium dioxide powder around the graphite boat, putting the graphite boat into an aluminum oxide square crucible, then putting the crucible into a tubular furnace, reducing the crucible into vanadium dioxide at a relatively low temperature, and then continuously heating and annealing in a reducing atmosphere to obtain the doped vanadium trioxide film. The obtained finished product is a polycrystalline film, the obtained film is uniform, the high-temperature phase change of the film ranges from 250 K to 380 K, and the resistance change is 2-20 times after phase change.
本发明公开了一种溶胶‑凝胶法制备铝掺杂三氧化二钒薄膜的方法，将异丙醇钒与异丙醇铝溶液溶于异丙醇中，并加入乙酸充分混合均匀后获得溶胶；将溶胶逐滴滴涂在三氧化二铝基片表面形成薄膜，每一滴干燥后再滴下一滴，通过不同的滴数控制薄膜的相对厚度。将获得的薄膜放在石墨舟中，并在其周围放上二氧化钒粉末，将石墨舟放在氧化铝方形坩埚中，然后将坩埚放进管式炉中，先在相对低的温度中还原成二氧化钒，而后继续在还原性氛围中升温退火得到掺杂的三氧化二钒薄膜。本发明得到的成品是多晶膜，得到的薄膜均匀，薄膜高温相变在250K～380K之间，相变后电阻变化2～20倍。
Method for preparing aluminum-doped vanadium trioxide film by sol-gel method
溶胶-凝胶法制备铝掺杂三氧化二钒薄膜的方法
MA YONGCHANG (Autor:in) / XIAO GUOQIANG (Autor:in)
13.12.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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