Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of high-volume resistivity electrostatic chuck aluminum nitride ceramic disc
The invention discloses a preparation method of a high-volume-resistivity electrostatic chuck aluminum nitride ceramic plate, and belongs to the technical field of electrostatic chucks, the method comprises the following steps: raw material preparation: aluminum nitride powder, an oxide dopant and an organic additive are used as raw materials, the oxide dopant comprises 0.1-1 wt% of SiO2, 0.1-1 wt% of TiO2, 0.1-5 wt% of Y2O3, 0.1-2 wt% of CaO, 0.1-2 wt% of MgO and 0.1-2 wt% of BaO, the organic additive is added into the aluminum nitride powder, and the organic additive is added into the aluminum nitride powder; the organic additives comprise a solvent, a dispersing agent and a binder; the raw materials are subjected to mixing and ball milling for 4-8 h through a planetary ball mill, the ball milling rotating speed is 350-450 r/min, and the ball milling temperature is 25-30 DEG C; forming: forming by adopting a dry pressing forming method or a tape casting forming method; glue discharging: the highest temperature of glue discharging is 500-600 DEG C; sintering: adopting double-shaft pressurized nitrogen hot pressed sintering, keeping the highest temperature of the ceramic body at 1600-1800 DEG C for 2-8 hours, and keeping the pressure at 5-30 Mpa.
本发明公开了一种高体积电阻率静电卡盘氮化铝陶瓷盘的制备方法，属于静电卡盘技术领域，所述方法包括：原料准备：以氮化铝粉体、氧化物掺杂剂以及有机添加剂为原料，其中，所述氧化物掺杂剂包括0.1～1wt％SiO2、0.1～1wt％TiO2、0.1～5wt％Y2O3、0.1～2wt％CaO、0.1～2wt％MgO和0.1～2wt％BaO，所述有机添加剂为溶剂、分散剂、粘结剂；混料：采用行星球磨机上述原料进行混料球磨4～8h，球磨的转速为350～450r/min，球磨的温度为25～30℃；成型：采用干压成型或者流延成型的方法成型；排胶：排胶的最高温度为500～600℃；烧结：采用双轴加压式氮气热压烧结，陶瓷体最高温度1600～1800℃，最高温度保温时间2～8h，压力5～30Mpa。
Preparation method of high-volume resistivity electrostatic chuck aluminum nitride ceramic disc
The invention discloses a preparation method of a high-volume-resistivity electrostatic chuck aluminum nitride ceramic plate, and belongs to the technical field of electrostatic chucks, the method comprises the following steps: raw material preparation: aluminum nitride powder, an oxide dopant and an organic additive are used as raw materials, the oxide dopant comprises 0.1-1 wt% of SiO2, 0.1-1 wt% of TiO2, 0.1-5 wt% of Y2O3, 0.1-2 wt% of CaO, 0.1-2 wt% of MgO and 0.1-2 wt% of BaO, the organic additive is added into the aluminum nitride powder, and the organic additive is added into the aluminum nitride powder; the organic additives comprise a solvent, a dispersing agent and a binder; the raw materials are subjected to mixing and ball milling for 4-8 h through a planetary ball mill, the ball milling rotating speed is 350-450 r/min, and the ball milling temperature is 25-30 DEG C; forming: forming by adopting a dry pressing forming method or a tape casting forming method; glue discharging: the highest temperature of glue discharging is 500-600 DEG C; sintering: adopting double-shaft pressurized nitrogen hot pressed sintering, keeping the highest temperature of the ceramic body at 1600-1800 DEG C for 2-8 hours, and keeping the pressure at 5-30 Mpa.
本发明公开了一种高体积电阻率静电卡盘氮化铝陶瓷盘的制备方法，属于静电卡盘技术领域，所述方法包括：原料准备：以氮化铝粉体、氧化物掺杂剂以及有机添加剂为原料，其中，所述氧化物掺杂剂包括0.1～1wt％SiO2、0.1～1wt％TiO2、0.1～5wt％Y2O3、0.1～2wt％CaO、0.1～2wt％MgO和0.1～2wt％BaO，所述有机添加剂为溶剂、分散剂、粘结剂；混料：采用行星球磨机上述原料进行混料球磨4～8h，球磨的转速为350～450r/min，球磨的温度为25～30℃；成型：采用干压成型或者流延成型的方法成型；排胶：排胶的最高温度为500～600℃；烧结：采用双轴加压式氮气热压烧结，陶瓷体最高温度1600～1800℃，最高温度保温时间2～8h，压力5～30Mpa。
Preparation method of high-volume resistivity electrostatic chuck aluminum nitride ceramic disc
一种高体积电阻率静电卡盘氮化铝陶瓷盘的制备方法
SHI ZHEYUAN (Autor:in) / CHEN CHAOQUN (Autor:in) / LI JUN (Autor:in) / XIAO WEI (Autor:in) / ZHANG QIANWEN (Autor:in) / ZHOU JUN (Autor:in)
03.01.2025
Patent
Elektronische Ressource
Chinesisch
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