Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PROCÉDÉ DE PRÉPARATION DE CÉRAMIQUES, CÉRAMIQUES AINSI OBTENUES ET LEURS UTILISATIONS NOTAMMENT COMME CIBLE POUR PULVÉRISATION CATHODIQUE
A method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high density thereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.
PROCÉDÉ DE PRÉPARATION DE CÉRAMIQUES, CÉRAMIQUES AINSI OBTENUES ET LEURS UTILISATIONS NOTAMMENT COMME CIBLE POUR PULVÉRISATION CATHODIQUE
A method for preparing a ceramic from an inorganic base material in the form of a powder with a high boiling point, including a step in which the powder of the inorganic base material is mixed with a second inorganic component which is also in powder form and which serves as a dopant for the inorganic base material. The dopant comprises a single inorganic material or a mixture of at least two inorganic materials that have a dopant effect on the inorganic base material. The method also includes a sintering step performed at a high temperature. Owing to the high density thereof, the resulting ceramics are suitable for use as a target element. The films and electrodes obtained from said ceramics have particularly beneficial properties.
PROCÉDÉ DE PRÉPARATION DE CÉRAMIQUES, CÉRAMIQUES AINSI OBTENUES ET LEURS UTILISATIONS NOTAMMENT COMME CIBLE POUR PULVÉRISATION CATHODIQUE
METHOD FOR PRODUCING CERAMICS, CERAMICS OBTAINED BY MEANS OF THIS PROCESS AND THEIR USES IN PARTICULAR AS TARGET FOR CATHODIC SPUTTERING
VERFAHREN ZUR HERSTELLUNG VON KERAMIKEN, SO ERHALTENE KERAMIKEN UND IHRE VERWENDUNGEN, INSBESONDERE ALS TARGET FÜR DIE KATHODENZERSTÄUBUNG
CAMPET GUY (Autor:in) / SAADEDDIN IYAD (Autor:in) / ZAGHIG KARIM (Autor:in)
27.12.2017
Patent
Elektronische Ressource
Französisch
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