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PIEZOELECTRIC ELEMENT, OSCILLATORY WAVE MOTOR, AND OPTICAL APPARATUS
A piezoelectric element that can decrease the output voltage for detection relative to the input voltage for driving without requiring a step-down circuit between a detection phase electrode and a phase comparator and an oscillatory wave motor including the piezoelectric element are provided. A piezoelectric element includes a piezoelectric material (1) having a first surface and a second surface, a common electrode (2) disposed on the first surface, and a drive phase electrode (3, 4) and a detection phase electrode (8) disposed on the second surface. An absolute value d(1) of a piezoelectric constant of the piezoelectric material in a first portion sandwiched between the drive phase electrode and the common electrode and an absolute value d(2) of a piezoelectric constant of the piezoelectric material in a second portion sandwiched between the detection phase electrode and the common electrode satisfy d(2) < d(1). An oscillatory wave motor includes this piezoelectric element. A method to reduce the piezoelectric constant by bonding electrical connection at a sufficiently high temperature above the Curie temperature or a depolarization temperature with a subsequent polarization step at a lower temperature is disclosed.
PIEZOELECTRIC ELEMENT, OSCILLATORY WAVE MOTOR, AND OPTICAL APPARATUS
A piezoelectric element that can decrease the output voltage for detection relative to the input voltage for driving without requiring a step-down circuit between a detection phase electrode and a phase comparator and an oscillatory wave motor including the piezoelectric element are provided. A piezoelectric element includes a piezoelectric material (1) having a first surface and a second surface, a common electrode (2) disposed on the first surface, and a drive phase electrode (3, 4) and a detection phase electrode (8) disposed on the second surface. An absolute value d(1) of a piezoelectric constant of the piezoelectric material in a first portion sandwiched between the drive phase electrode and the common electrode and an absolute value d(2) of a piezoelectric constant of the piezoelectric material in a second portion sandwiched between the detection phase electrode and the common electrode satisfy d(2) < d(1). An oscillatory wave motor includes this piezoelectric element. A method to reduce the piezoelectric constant by bonding electrical connection at a sufficiently high temperature above the Curie temperature or a depolarization temperature with a subsequent polarization step at a lower temperature is disclosed.
PIEZOELECTRIC ELEMENT, OSCILLATORY WAVE MOTOR, AND OPTICAL APPARATUS
PIEZOELEKTRISCHES ELEMENT, OSZILLIERENDER WELLENMOTOR UND OPTISCHE VORRICHTUNG
ELÉMENT PIÉZOÉLECTRIQUE, MOTEUR À ONDES D'OSCILLATION ET APPAREIL OPTIQUE
FURUTA TATSUO (Autor:in) / SAITO HIROSHI (Autor:in) / KUBOTA MAKOTO (Autor:in) / AKASHI KENICHI (Autor:in)
03.05.2017
Patent
Elektronische Ressource
Englisch
IPC:
B82Y
Bestimmter Gebrauch oder bestimmte Anwendung von Nanostrukturen
,
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
/
C04B
Kalk
,
LIME
/
G02B
Optische Elemente, Systeme oder Geräte
,
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
H02N
Elektrische Maschinen, soweit nicht anderweitig vorgesehen
,
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
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