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LaNiO3 thin film-forming composition and method of forming LaNiO3 thin film using the same
A LaNiO 3 thin film having extremely few voids is uniformly formed. Provided is a LaNiO 3 thin film-forming composition for forming a LaNiO 3 thin film. It induces: a LaNiO 3 precursor; a first organic solvent; a stabilizer; and a second organic solvent. The first organic solvent includes carboxylic acids, alcohols, esters, ketones, ethers, cycloalkanes, aromatic compounds, or tetrahydrofuran. The stabilizer includes ²-diketones, ²-ketones, ²-keto esters, oxyacids, diols, triols, carboxylic acids, alkanolamines, or polyvalent amines. The second organic solvent has a boiling point of 150°C to 300°C and a surface tension of 20 to 50 dyn/cm. The LaNiO 3 precursor content is I to 20 mass% with respect to 100 mass% of the composition. The stabilizer content is 0 to 10 mol with respect to 1 mol of a total amount of the LaNiO 3 precursors. The second organic solvent content is 5 to 20 mass% with respect to the composition.
LaNiO3 thin film-forming composition and method of forming LaNiO3 thin film using the same
A LaNiO 3 thin film having extremely few voids is uniformly formed. Provided is a LaNiO 3 thin film-forming composition for forming a LaNiO 3 thin film. It induces: a LaNiO 3 precursor; a first organic solvent; a stabilizer; and a second organic solvent. The first organic solvent includes carboxylic acids, alcohols, esters, ketones, ethers, cycloalkanes, aromatic compounds, or tetrahydrofuran. The stabilizer includes ²-diketones, ²-ketones, ²-keto esters, oxyacids, diols, triols, carboxylic acids, alkanolamines, or polyvalent amines. The second organic solvent has a boiling point of 150°C to 300°C and a surface tension of 20 to 50 dyn/cm. The LaNiO 3 precursor content is I to 20 mass% with respect to 100 mass% of the composition. The stabilizer content is 0 to 10 mol with respect to 1 mol of a total amount of the LaNiO 3 precursors. The second organic solvent content is 5 to 20 mass% with respect to the composition.
LaNiO3 thin film-forming composition and method of forming LaNiO3 thin film using the same
LaNiO3-dünnschichtbildende Zusammensetzung und Verfahren zur Herstellung des LaNiO3-Dünnfilms damit
Composition de formation de film mince LaNiO3 et procédé de formation d'un film mince LaNiO3 l'utilisant
FUJII JUN (Autor:in) / SAKURAI HIDEAKI (Autor:in) / SOYAMA NOBUYUKI (Autor:in)
10.04.2019
Patent
Elektronische Ressource
Englisch
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