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COMPOSITION FOR FORMING CERIUM-DOPED PZT PIEZOELECTRIC FILM
A composition for forming a Ce-doped PZT-based piezoelectric film contains: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone. The PZT-based precursors are contained so that a metal atom ratio (Pb:Ce:Zr:Ti) in the composition satisfies (1.00 to 1.28):(0.005 to 0.05):(0.40 to 0.55):(0.60 to 0.45) and the total of Zr and Ti in a metal atom ratio is 1. A concentration of the PZT-based precursor in 100 mass% of the composition is from 17 mass% to 35 mass% in terms of an oxide concentration, a rate of diol in 100 mass% of the composition is from 16 mass% to 56 mass%, and a molar ratio of polyvinylpyrrolidone to I mole of the PZT-based precursor is 0.01 moles to 0.25 moles in terms of monomers.
COMPOSITION FOR FORMING CERIUM-DOPED PZT PIEZOELECTRIC FILM
A composition for forming a Ce-doped PZT-based piezoelectric film contains: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone. The PZT-based precursors are contained so that a metal atom ratio (Pb:Ce:Zr:Ti) in the composition satisfies (1.00 to 1.28):(0.005 to 0.05):(0.40 to 0.55):(0.60 to 0.45) and the total of Zr and Ti in a metal atom ratio is 1. A concentration of the PZT-based precursor in 100 mass% of the composition is from 17 mass% to 35 mass% in terms of an oxide concentration, a rate of diol in 100 mass% of the composition is from 16 mass% to 56 mass%, and a molar ratio of polyvinylpyrrolidone to I mole of the PZT-based precursor is 0.01 moles to 0.25 moles in terms of monomers.
COMPOSITION FOR FORMING CERIUM-DOPED PZT PIEZOELECTRIC FILM
ZUSAMMENSETZUNG ZUR BILDUNG EINER ZER-DOTIERTEN PIEZOELEKTRISCHEN PZT-SCHICHT
COMPOSITION POUR LA FORMATION D'UN FILM PIÉZOÉLECTRIQUE PZT DOPÉ AU CÉRIUM
DOI TOSHIHIRO (Autor:in) / SAKURAI HIDEAKI (Autor:in) / SOYAMA NOBUYUKI (Autor:in)
21.11.2018
Patent
Elektronische Ressource
Englisch
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