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DRUCKSENSOR MIT EINEM KERAMISCHEN GRUNDKÖRPER
A pressure sensor, including a platform of ceramic, a measuring membrane arranged on the platform, a pressure measuring chamber enclosed in the platform under the measuring membrane, and at least one metal body connected with the platform via a pressure-tight, preferably elastomer free, mechanical connection. Thermomechanical stresses arising from the connection are reduced by features including that the pressure-tight, mechanical connection occurs via an adapting body arranged between the platform and the metal body. The adapting body has a thermal expansion coefficient, which rises in direction (z) extending from the platform to the metal body from a coefficient of expansion corresponding to a thermal coefficient of expansion of the ceramic of the platform to a coefficient of expansion corresponding to the thermal coefficient of expansion of the metal body, and the adapting body is connected by a first joint with the platform and by a second joint with the metal body.
DRUCKSENSOR MIT EINEM KERAMISCHEN GRUNDKÖRPER
A pressure sensor, including a platform of ceramic, a measuring membrane arranged on the platform, a pressure measuring chamber enclosed in the platform under the measuring membrane, and at least one metal body connected with the platform via a pressure-tight, preferably elastomer free, mechanical connection. Thermomechanical stresses arising from the connection are reduced by features including that the pressure-tight, mechanical connection occurs via an adapting body arranged between the platform and the metal body. The adapting body has a thermal expansion coefficient, which rises in direction (z) extending from the platform to the metal body from a coefficient of expansion corresponding to a thermal coefficient of expansion of the ceramic of the platform to a coefficient of expansion corresponding to the thermal coefficient of expansion of the metal body, and the adapting body is connected by a first joint with the platform and by a second joint with the metal body.
DRUCKSENSOR MIT EINEM KERAMISCHEN GRUNDKÖRPER
PRESSURE SENSOR WITH A CERAMIC BASE BODY
CAPTEUR DE PRESSION COMPRENANT UN CORPS DE BASE EN CÉRAMIQUE
DREWES ULFERT (Autor:in) / SCHMIDT ELKE (Autor:in) / UEHLIN THOMAS (Autor:in) / BERLINGER ANDREA (Autor:in)
22.05.2019
Patent
Elektronische Ressource
Deutsch
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