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DESPOSITION SOURCE EVAPORATING APPARATUS
A deposition source evaporating apparatus includes a crucible set for accommodating a deposition source, a spray unit positioned on the crucible set, a heater positioned in the crucible set for heating the crucible set to evaporate the deposition source through the spray unit, and a heat radiation preventing plate surrounding the spray unit for blocking radiation of heat at a side of the spray unit. At least one of the crucible unit and the heat radiation preventing plate includes a carbon fiber composite material.
DESPOSITION SOURCE EVAPORATING APPARATUS
A deposition source evaporating apparatus includes a crucible set for accommodating a deposition source, a spray unit positioned on the crucible set, a heater positioned in the crucible set for heating the crucible set to evaporate the deposition source through the spray unit, and a heat radiation preventing plate surrounding the spray unit for blocking radiation of heat at a side of the spray unit. At least one of the crucible unit and the heat radiation preventing plate includes a carbon fiber composite material.
DESPOSITION SOURCE EVAPORATING APPARATUS
VORRICHTUNG ZUR VERDAMPFUNG EINER ABLAGERUNGSQUELLE
APPAREIL D'ÉVAPORATION DE SOURCE DE DÉPÔT
AN BYOUNGGU (Autor:in) / KIM KYUNGHAN (Autor:in) / CHA MINCHEOL (Autor:in) / PARK JAEMORK (Autor:in) / CHO WONSEOK (Autor:in) / JUNG KICHAE (Autor:in) / CHO YUNHYUNG (Autor:in)
18.11.2020
Patent
Elektronische Ressource
Englisch
TIBKAT | 1971
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