Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SPRAYED LITHIUM COBALT OXIDE TARGETS
A sputtering target comprising a top coat including a composition of lithium cobalt oxide LiyCozOx. x is smaller than or equal to y+z, and the lithium cobalt oxide has an X-Ray diffraction pattern with a peak P2 at 44°±0.2° 2-theta. The X-Ray diffraction pattern is measured with an X-Ray diffractometer with CuKα1 radiation.
SPRAYED LITHIUM COBALT OXIDE TARGETS
A sputtering target comprising a top coat including a composition of lithium cobalt oxide LiyCozOx. x is smaller than or equal to y+z, and the lithium cobalt oxide has an X-Ray diffraction pattern with a peak P2 at 44°±0.2° 2-theta. The X-Ray diffraction pattern is measured with an X-Ray diffractometer with CuKα1 radiation.
SPRAYED LITHIUM COBALT OXIDE TARGETS
GESPRÜHTE LITHIUM-KOBALT-OXID-ZIELE
CIBLES D'OXYDE MIXTE DE COBALT ET DE LITHIUM PULVÉRISÉES
DE BOSSCHER WILMERT (Autor:in) / OBERSTE BERGHAUS JÖRG (Autor:in)
28.10.2020
Patent
Elektronische Ressource
Englisch
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