Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ALUMINUM NITRIDE SHEET
An aluminum nitride plate includes a surface layer and a lower layer. The aluminum nitride plate satisfies a "relation 1: c1 > 97.5%", a "relation 2: c2 > 97.0%", a "relation 3: w1 < 2.5 degrees", and a "relation 4: w1/w2 < 0.995" where c1 is a c-plane degree of orientation that is defined as a ratio of a diffraction intensity of (002) plane to a sum of the diffraction intensity of (002) plane and a diffraction intensity of (100) plane when the surface layer of the aluminum nitride plate is subjected to an X-ray diffraction measurement along a thickness direction of the surface layer, and c2 is a c-plane degree of orientation that is defined as a ratio of the diffraction intensity of (002) plane to the sum of the diffraction intensity of (002) plane and the diffraction intensity of (100) plane when a portion other than the surface layer of the aluminum nitride plate is subjected to the X-ray diffraction measurement along a thickness direction of the portion other than the surface layer, wherein w1 is a half-value width in an X-ray rocking curve profile of (102) plane of the surface layer of the aluminum nitride plate and w2 is a half-value width in the X-ray rocking curve profile of (102) plane of the portion other than the surface layer of the aluminum nitride plate.
ALUMINUM NITRIDE SHEET
An aluminum nitride plate includes a surface layer and a lower layer. The aluminum nitride plate satisfies a "relation 1: c1 > 97.5%", a "relation 2: c2 > 97.0%", a "relation 3: w1 < 2.5 degrees", and a "relation 4: w1/w2 < 0.995" where c1 is a c-plane degree of orientation that is defined as a ratio of a diffraction intensity of (002) plane to a sum of the diffraction intensity of (002) plane and a diffraction intensity of (100) plane when the surface layer of the aluminum nitride plate is subjected to an X-ray diffraction measurement along a thickness direction of the surface layer, and c2 is a c-plane degree of orientation that is defined as a ratio of the diffraction intensity of (002) plane to the sum of the diffraction intensity of (002) plane and the diffraction intensity of (100) plane when a portion other than the surface layer of the aluminum nitride plate is subjected to the X-ray diffraction measurement along a thickness direction of the portion other than the surface layer, wherein w1 is a half-value width in an X-ray rocking curve profile of (102) plane of the surface layer of the aluminum nitride plate and w2 is a half-value width in the X-ray rocking curve profile of (102) plane of the portion other than the surface layer of the aluminum nitride plate.
ALUMINUM NITRIDE SHEET
ALUMINIUMNITRIDFOLIE
FEUILLE DE NITRURE D'ALUMINIUM
KOBAYASHI YOSHIMASA (Autor:in) / KOBAYASHI HIROHARU (Autor:in) / SHIBATA HIROYUKI (Autor:in)
15.12.2021
Patent
Elektronische Ressource
Englisch
ALUMINUM NITRIDE POWDER AND ALUMINUM NITRIDE SINTERED COMPACT
| Europäisches Patentamt | 2017