Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
HIGH-THERMAL-CONDUCTIVITY SILICON NITRIDE CERAMIC INSULATING PLATE AND PREPARATION METHOD THEREFOR
The present invention relates to the technical field of ceramic substrates, and provides a high-thermal-conductivity silicon nitride ceramic insulating plate and a preparation method therefor. According to the present invention, magnesium oxide is used as a first sintering aid, and during a sintering process, magnesium oxide reacts with raw material silicon nitride powder to generate a liquid phase, so that the sintering temperature can be reduced, the production cost is saved, and the density and the bending strength of the silicon nitride ceramic insulating plate can also be improved; hafnium oxide is used as a second sintering aid, and due to the fact that hafnium oxide has a strong capacity of binding to oxygen, hafnium oxide is bound to impurity oxygen in the raw material silicon nitride powder during the sintering process, so that the content of lattice oxygen is eliminated, and the thermal conductivity of the silicon nitride ceramic insulating plate is improved; a third sintering aid of the present invention can prompt liquid phase reaction during the sintering process, and the third sintering aid reacts with silicon nitride powder to form a solid solution, so that amorphous phases at the grain boundary are reduced, high thermal conductivity is ensured, and the bending strength of a product is improved. In addition, according to the present invention, the problem in the prior art that a large-size ultra-thin substrate is difficult to prepare is solved.
HIGH-THERMAL-CONDUCTIVITY SILICON NITRIDE CERAMIC INSULATING PLATE AND PREPARATION METHOD THEREFOR
The present invention relates to the technical field of ceramic substrates, and provides a high-thermal-conductivity silicon nitride ceramic insulating plate and a preparation method therefor. According to the present invention, magnesium oxide is used as a first sintering aid, and during a sintering process, magnesium oxide reacts with raw material silicon nitride powder to generate a liquid phase, so that the sintering temperature can be reduced, the production cost is saved, and the density and the bending strength of the silicon nitride ceramic insulating plate can also be improved; hafnium oxide is used as a second sintering aid, and due to the fact that hafnium oxide has a strong capacity of binding to oxygen, hafnium oxide is bound to impurity oxygen in the raw material silicon nitride powder during the sintering process, so that the content of lattice oxygen is eliminated, and the thermal conductivity of the silicon nitride ceramic insulating plate is improved; a third sintering aid of the present invention can prompt liquid phase reaction during the sintering process, and the third sintering aid reacts with silicon nitride powder to form a solid solution, so that amorphous phases at the grain boundary are reduced, high thermal conductivity is ensured, and the bending strength of a product is improved. In addition, according to the present invention, the problem in the prior art that a large-size ultra-thin substrate is difficult to prepare is solved.
HIGH-THERMAL-CONDUCTIVITY SILICON NITRIDE CERAMIC INSULATING PLATE AND PREPARATION METHOD THEREFOR
KERAMIKISOLIERPLATTE AUS SILICIUMNITRID MIT HOHER THERMISCHER LEITFÄHIGKEIT UND HERSTELLUNGSVERFAHREN DAFÜR
PLAQUE ISOLANTE EN CÉRAMIQUE-NITRURE DE SILICIUM À CONDUCTIVITÉ THERMIQUE ÉLEVÉE ET SON PROCÉDÉ DE PRÉPARATION
ZHANG WEIRU (Autor:in) / LIANG PANPAN (Autor:in) / JING HE (Autor:in) / SUN FENG (Autor:in) / XU XUEMIN (Autor:in) / DONG TINGXIA (Autor:in) / LV PEIYUAN (Autor:in) / HE XIAO (Autor:in) / XU JINMENG (Autor:in) / WEI WENZHAO (Autor:in)
26.06.2024
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
HIGH-THERMAL-CONDUCTIVITY SILICON NITRIDE CERAMIC INSULATING PLATE AND PREPARATION METHOD THEREFOR
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