Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CRYSTAL-ORIENTED PIEZOELECTRIC CERAMIC, MANUFACTURING METHOD THEREOF, AND LAMINATION TYPE PIEZOELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide a method for manufacturing a crystal-oriented piezoelectric ceramic, which enables the suppression of the interlayer delamination between a ceramic layer and an electrode layer.SOLUTION: A method for manufacturing a crystal-oriented piezoelectric ceramic comprises: a step S11 of preparing tabular crystal powder made of a perovskite compound and then, mixing the tabular crystal powder with an additive raw material into a mixture; a step S12 of shaping the mixture into an oriented mold with the tabular crystal powder oriented; a step S13 of preliminarily baking the oriented mold under an atmosphere with an oxygen partial pressure over 1×10kPa; a step S14 of regularly baking the oriented mold with an oxygen partial pressure lower than that in the preliminary baking step and/or a temperature higher than that in the preliminary baking step to grow grains of the tabular crystal powder, thereby forming oriented crystal; and a step S15 of re-oxidizing the regularly-baked oriented mold under an oxidizing atmosphere with an oxygen partial pressure over 1×10kPa and a temperature lower than that in the regular baking.
【課題】セラミックス層と電極層の層間の剥離を抑制できる結晶配向圧電セラミックスの製造方法を提供する。【解決手段】結晶配向圧電セラミックスの製造方法は、ペロブスカイト型化合物からなる板状結晶粉末を用意し、板状結晶粉末に添加原料材を混合する工程Ｓ１１、混合物を板状結晶粉末が配向した配向性成形体とする工程Ｓ１２、配向性成形体を、酸素分圧が１?１０−１０ｋＰａ超の雰囲気下で予備焼成する工程Ｓ１３、予備焼成よりも、低い酸素分圧および／または高い温度で本焼成することで、板状結晶粉末を粒成長させて配向結晶を形成する工程Ｓ１４、本焼成した焼成体を、酸素分圧が１?１０−４ｋＰａ超の酸化性雰囲気下において本焼成の温度よりも低い温度で再酸化する工程Ｓ１５からなる。【選択図】図７
CRYSTAL-ORIENTED PIEZOELECTRIC CERAMIC, MANUFACTURING METHOD THEREOF, AND LAMINATION TYPE PIEZOELECTRIC ELEMENT
PROBLEM TO BE SOLVED: To provide a method for manufacturing a crystal-oriented piezoelectric ceramic, which enables the suppression of the interlayer delamination between a ceramic layer and an electrode layer.SOLUTION: A method for manufacturing a crystal-oriented piezoelectric ceramic comprises: a step S11 of preparing tabular crystal powder made of a perovskite compound and then, mixing the tabular crystal powder with an additive raw material into a mixture; a step S12 of shaping the mixture into an oriented mold with the tabular crystal powder oriented; a step S13 of preliminarily baking the oriented mold under an atmosphere with an oxygen partial pressure over 1×10kPa; a step S14 of regularly baking the oriented mold with an oxygen partial pressure lower than that in the preliminary baking step and/or a temperature higher than that in the preliminary baking step to grow grains of the tabular crystal powder, thereby forming oriented crystal; and a step S15 of re-oxidizing the regularly-baked oriented mold under an oxidizing atmosphere with an oxygen partial pressure over 1×10kPa and a temperature lower than that in the regular baking.
【課題】セラミックス層と電極層の層間の剥離を抑制できる結晶配向圧電セラミックスの製造方法を提供する。【解決手段】結晶配向圧電セラミックスの製造方法は、ペロブスカイト型化合物からなる板状結晶粉末を用意し、板状結晶粉末に添加原料材を混合する工程Ｓ１１、混合物を板状結晶粉末が配向した配向性成形体とする工程Ｓ１２、配向性成形体を、酸素分圧が１?１０−１０ｋＰａ超の雰囲気下で予備焼成する工程Ｓ１３、予備焼成よりも、低い酸素分圧および／または高い温度で本焼成することで、板状結晶粉末を粒成長させて配向結晶を形成する工程Ｓ１４、本焼成した焼成体を、酸素分圧が１?１０−４ｋＰａ超の酸化性雰囲気下において本焼成の温度よりも低い温度で再酸化する工程Ｓ１５からなる。【選択図】図７
CRYSTAL-ORIENTED PIEZOELECTRIC CERAMIC, MANUFACTURING METHOD THEREOF, AND LAMINATION TYPE PIEZOELECTRIC ELEMENT
結晶配向圧電セラミックス、その製造方法、及び積層型圧電素子
YAMANAKA SHUJI (Autor:in) / KATO TOMOAKI (Autor:in) / TANAKA KENYA (Autor:in) / YAMADA KOJI (Autor:in)
12.11.2015
Patent
Elektronische Ressource
Japanisch
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