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PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric element with improved piezoelectric characteristics, and a piezoelectric element application device.SOLUTION: A piezoelectric element 300 includes a first electrode 60, a second electrode 80, and a thin film piezoelectric layer 70 provided between the first electrode 60 and the second electrode 80 and made of a perovskite complex oxide containing potassium, sodium, and niobium. In an X-ray diffraction pattern by θ-2θ measurement, the piezoelectric layer 70 has peaks derived from (002) and (200) in a range of 2θ from 45° to 47°, and the peak position on the high angle side of the peak is 46.0°≤2θ≤46.5°, and the difference between the peak on the high angle side and the peak on the low angle side is larger than 0.60°.SELECTED DRAWING: Figure 4
【課題】圧電特性の向上した圧電素子、及び圧電素子応用デバイスを提供する。【解決手段】圧電素子３００は、第１電極６０と、第２電極８０と、第１電極６０と第２電極８０との間に設けられたカリウムと、ナトリウムと、ニオブと、を含むペロブスカイト型の複合酸化物からなる薄膜の圧電体層７０と、を備える。圧電体層７０は、θ−２θ測定によるＸ線回折パターンにおいて、２θが４５°〜４７°の範囲に、（００２）及び（２００）に由来するピークがあり、前記ピークの高角度側のピーク位置が４６．０°≦２θ≦４６．５°であり、高角度側のピークと低角度側のピークの２θの差が０．６０°より大きい。【選択図】図４
PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric element with improved piezoelectric characteristics, and a piezoelectric element application device.SOLUTION: A piezoelectric element 300 includes a first electrode 60, a second electrode 80, and a thin film piezoelectric layer 70 provided between the first electrode 60 and the second electrode 80 and made of a perovskite complex oxide containing potassium, sodium, and niobium. In an X-ray diffraction pattern by θ-2θ measurement, the piezoelectric layer 70 has peaks derived from (002) and (200) in a range of 2θ from 45° to 47°, and the peak position on the high angle side of the peak is 46.0°≤2θ≤46.5°, and the difference between the peak on the high angle side and the peak on the low angle side is larger than 0.60°.SELECTED DRAWING: Figure 4
【課題】圧電特性の向上した圧電素子、及び圧電素子応用デバイスを提供する。【解決手段】圧電素子３００は、第１電極６０と、第２電極８０と、第１電極６０と第２電極８０との間に設けられたカリウムと、ナトリウムと、ニオブと、を含むペロブスカイト型の複合酸化物からなる薄膜の圧電体層７０と、を備える。圧電体層７０は、θ−２θ測定によるＸ線回折パターンにおいて、２θが４５°〜４７°の範囲に、（００２）及び（２００）に由来するピークがあり、前記ピークの高角度側のピーク位置が４６．０°≦２θ≦４６．５°であり、高角度側のピークと低角度側のピークの２θの差が０．６０°より大きい。【選択図】図４
PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE
圧電素子、及び圧電素子応用デバイス
KITADA KAZUYA (Autor:in) / SUMI KOJI (Autor:in) / SAKAI TOMOHIRO (Autor:in) / TAKAHASHI TOSHIAKI (Autor:in)
23.08.2018
Patent
Elektronische Ressource
Japanisch
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