Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD
To provide a piezoelectric element with good piezoelectric characteristics.SOLUTION: A piezoelectric element includes a first electrode provided above a substrate, a piezoelectric layer provided above the first electrode and including a crystal in which the direction of spontaneous polarization is similar to the direction of spontaneous polarization of a rhombohedral perovskite structure, and a second electrode provided on the piezoelectric layer, and 2σ of the rocking curve signal intensity distribution of an X-ray diffraction signal belonging to (100) when a crystal structure of the crystal is regarded as a pseudo-cubic crystal is within 7.0°.SELECTED DRAWING: Figure 1
【課題】圧電特性の良好な圧電素子を提供すること。【解決手段】基体の上方に設けられた第１電極と、自発分極の方向が、菱面体晶のペロブスカイト構造の自発分極の方向と類似する結晶を含み、前記第１電極の上方に設けられた圧電体層と、前記圧電体層上に設けられた第２電極と、を備え、前記結晶の結晶構造を擬立方晶とみなした場合の（１００）に帰属されるＸ線回折信号のロッキングカーブの信号強度分布の、２σが７．０°以内である、圧電素子。【選択図】図１
PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD
To provide a piezoelectric element with good piezoelectric characteristics.SOLUTION: A piezoelectric element includes a first electrode provided above a substrate, a piezoelectric layer provided above the first electrode and including a crystal in which the direction of spontaneous polarization is similar to the direction of spontaneous polarization of a rhombohedral perovskite structure, and a second electrode provided on the piezoelectric layer, and 2σ of the rocking curve signal intensity distribution of an X-ray diffraction signal belonging to (100) when a crystal structure of the crystal is regarded as a pseudo-cubic crystal is within 7.0°.SELECTED DRAWING: Figure 1
【課題】圧電特性の良好な圧電素子を提供すること。【解決手段】基体の上方に設けられた第１電極と、自発分極の方向が、菱面体晶のペロブスカイト構造の自発分極の方向と類似する結晶を含み、前記第１電極の上方に設けられた圧電体層と、前記圧電体層上に設けられた第２電極と、を備え、前記結晶の結晶構造を擬立方晶とみなした場合の（１００）に帰属されるＸ線回折信号のロッキングカーブの信号強度分布の、２σが７．０°以内である、圧電素子。【選択図】図１
PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD
圧電素子及び液体吐出ヘッド
YONEMURA TAKAYUKI (Autor:in) / ISSHIKI TETSUYA (Autor:in)
08.08.2019
Patent
Elektronische Ressource
Japanisch
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