Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
RETAINER
To prevent peeling of all of connection members, a conductive failure between the connection members and a power supply member, and removing of the power supply member.SOLUTION: A retainer is a device for holding an object onto a first front face of a ceramic member. The retainer comprises: an inner electrode; a connection member that is a connection member electrically connected to the inner electrode, includes a metal material and the ceramic material, in which an external peripheral part is arranged in an inner part of the ceramic member, and an inner side part is exposed to a second front face of the ceramic member; a power supply member; and a joint part formed by a non-active brazing filler metal, and jointing the inner side part of the connection member with the power supply member. In the connection member, a content rate of the metal material in a first part containing a third front face on the side opposite to the joint part is higher than that of the metal material in a second part having a thickness similar to that of the first part adjacent to the first part, and in a second part containing a fourth front face on the side opposite to the third front face.SELECTED DRAWING: Figure 3
【課題】接続部材全体の剥離、接続部材と給電部材との間の導通不良、給電部材の外れの発生を抑制する。【解決手段】保持装置は、セラミックス部材の第１の表面に対象物を保持する装置である。保持装置は、内部電極と、内部電極と電気的に接続された接続部材であって、金属材料とセラミックス材料とを含み、外周部がセラミックス部材の内部に配置され、かつ、内側部がセラミックス部材の第２の表面に露出している接続部材と、給電部材と、非活性ろう材により形成され、接続部材の内側部と給電部材とを接合する接合部とを備える。接続部材の内、接合部に対向する側の第３の表面を含む第１の部分における金属材料の含有割合は、接続部材の内、第１の部分に隣接すると共に第１の部分と同一の厚さを有し、かつ、第３の表面とは反対側の第４の表面を含む第２の部分における金属材料の含有割合より高い。【選択図】図３
RETAINER
To prevent peeling of all of connection members, a conductive failure between the connection members and a power supply member, and removing of the power supply member.SOLUTION: A retainer is a device for holding an object onto a first front face of a ceramic member. The retainer comprises: an inner electrode; a connection member that is a connection member electrically connected to the inner electrode, includes a metal material and the ceramic material, in which an external peripheral part is arranged in an inner part of the ceramic member, and an inner side part is exposed to a second front face of the ceramic member; a power supply member; and a joint part formed by a non-active brazing filler metal, and jointing the inner side part of the connection member with the power supply member. In the connection member, a content rate of the metal material in a first part containing a third front face on the side opposite to the joint part is higher than that of the metal material in a second part having a thickness similar to that of the first part adjacent to the first part, and in a second part containing a fourth front face on the side opposite to the third front face.SELECTED DRAWING: Figure 3
【課題】接続部材全体の剥離、接続部材と給電部材との間の導通不良、給電部材の外れの発生を抑制する。【解決手段】保持装置は、セラミックス部材の第１の表面に対象物を保持する装置である。保持装置は、内部電極と、内部電極と電気的に接続された接続部材であって、金属材料とセラミックス材料とを含み、外周部がセラミックス部材の内部に配置され、かつ、内側部がセラミックス部材の第２の表面に露出している接続部材と、給電部材と、非活性ろう材により形成され、接続部材の内側部と給電部材とを接合する接合部とを備える。接続部材の内、接合部に対向する側の第３の表面を含む第１の部分における金属材料の含有割合は、接続部材の内、第１の部分に隣接すると共に第１の部分と同一の厚さを有し、かつ、第３の表面とは反対側の第４の表面を含む第２の部分における金属材料の含有割合より高い。【選択図】図３
RETAINER
保持装置
WAKAZONO MAKOTO (Autor:in) / YAMAGUCHI AKIHIRO (Autor:in)
27.07.2020
Patent
Elektronische Ressource
Japanisch