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HEAT TREATMENT SETTER COMPOSED OF CERAMIC SINTERED BODY WITH IRREGULARITIES PROCESSED SURFACE
To provide a high functional heat treatment member that can suppress deformation and crack of an electronic component after firing even when producing a downsizing and high performance electronic component or the like by firing, and suppress, when using it for a vessel to synthesize high functional powder, a reaction between the vessel and the synthetic powder and sticking.SOLUTION: A heat treatment member includes irregularities satisfying following requirements a) to d) on a surface, and is composed of any of an alumina sintered body, a magnesia sintered body, a mullite sintered body, and spinel sintered body. The requirements include that: a) a maximum height Ry of convex parts of the irregularities is not more than 30 μm; b) a width of the convex parts of the irregularities is not more than 120 μm; c) the difference between the maximum height and the minimum height of the convex parts of the irregularities is not more than 15 μm; and d) there are 30 to 200 pieces of the convex parts of the irregularities within the area of 1 mm2 of the surface.SELECTED DRAWING: None
【課題】小型化・高性能化した電子部品等を焼成により製造する際でも焼成後の電子部品の変形や割れを抑制することができ、また、高機能粉体の合成用容器として用いた際に、前記容器と合成粉体との反応や引っ付きを抑制できる高機能の熱処理用部材の提供。【解決手段】表面に下記要件a)〜d)を満たす凹凸を有し、アルミナ質焼結体、マグネシア質焼結体、ムライト質焼結体、スピネル質焼結体のいずれかからなる熱処理用部材。a)前記凹凸の凸部の最大高さ:Ryが30μm以下である。b)前記凹凸の凸部の幅が120μm以下である。c)前記凹凸の凸部の最大高さと最小高さの差が15μm以下である。d)前記表面の1mm2の面積内に前記凹凸の凸部が30〜200個存在する。【選択図】なし
HEAT TREATMENT SETTER COMPOSED OF CERAMIC SINTERED BODY WITH IRREGULARITIES PROCESSED SURFACE
To provide a high functional heat treatment member that can suppress deformation and crack of an electronic component after firing even when producing a downsizing and high performance electronic component or the like by firing, and suppress, when using it for a vessel to synthesize high functional powder, a reaction between the vessel and the synthetic powder and sticking.SOLUTION: A heat treatment member includes irregularities satisfying following requirements a) to d) on a surface, and is composed of any of an alumina sintered body, a magnesia sintered body, a mullite sintered body, and spinel sintered body. The requirements include that: a) a maximum height Ry of convex parts of the irregularities is not more than 30 μm; b) a width of the convex parts of the irregularities is not more than 120 μm; c) the difference between the maximum height and the minimum height of the convex parts of the irregularities is not more than 15 μm; and d) there are 30 to 200 pieces of the convex parts of the irregularities within the area of 1 mm2 of the surface.SELECTED DRAWING: None
【課題】小型化・高性能化した電子部品等を焼成により製造する際でも焼成後の電子部品の変形や割れを抑制することができ、また、高機能粉体の合成用容器として用いた際に、前記容器と合成粉体との反応や引っ付きを抑制できる高機能の熱処理用部材の提供。【解決手段】表面に下記要件a)〜d)を満たす凹凸を有し、アルミナ質焼結体、マグネシア質焼結体、ムライト質焼結体、スピネル質焼結体のいずれかからなる熱処理用部材。a)前記凹凸の凸部の最大高さ:Ryが30μm以下である。b)前記凹凸の凸部の幅が120μm以下である。c)前記凹凸の凸部の最大高さと最小高さの差が15μm以下である。d)前記表面の1mm2の面積内に前記凹凸の凸部が30〜200個存在する。【選択図】なし
HEAT TREATMENT SETTER COMPOSED OF CERAMIC SINTERED BODY WITH IRREGULARITIES PROCESSED SURFACE
凹凸加工表面を有するセラミックス焼結体からなる熱処理用セッター
HIRASHITA KOJI (Autor:in) / KUBO KEISUKE (Autor:in) / ASANO KAZUYUKI (Autor:in) / ONISHI KOJI (Autor:in)
10.09.2020
Patent
Elektronische Ressource
Japanisch
IPC:
C04B
Kalk
,
LIME
/
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
Europäisches Patentamt | 2022
|