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RESISTANCE-ADJUSTED LOW-CONDUCTIVITY ALUMINA-ZIRCONIA COMPOSITE CERAMIC AND MANUFACTURING METHOD THEREFOR
To provide a resistance-adjusted low-conductivity alumina-zirconia composite ceramic which is a high-durability resistance-adjusted low-conductivity ceramic having heat resistance, thermal conductivity, low thermal expansion property, high strength, crystal stability, and thermal cycle stability (-50 to 400°C) in addition to electrical conductivity, and specifically for use in applying a high voltage (for example, a semiconductor manufacturing device such as an ion implantation device, or an electron/charged particle beam application device such as an electron microscope or an electric propulsion device such as an ion engine).SOLUTION: The resistance-adjusted low-conductivity alumina-zirconia composite ceramic is a sintered compact of raw material powders containing alumina, zirconia, and titanium oxide. In the sintered compact, the concentration of titanium oxide contained in zirconia particles is 0.4-0.8 in a Ti/Zr molar ratio, the content of aluminum titanate is 1 mass% or less, and the content of tetragonal and monoclinic zirconia is 10 mass% or less.SELECTED DRAWING: Figure 1
【課題】導電性以外に、耐熱性、熱伝導性、低熱膨張性、高強度、結晶安定性、熱サイクル安定性（-５０〜４００℃）を併せ持つ高耐久性の抵抗調整低導電性セラミックスである抵抗調整低導電性アルミナジルコニア複合セラミックス、特に高電圧印加する際の用途（たとえば、イオン注入装置などの半導体製造装置や、電子顕微鏡、イオンエンジンなどの電気推進機といった電子・荷電粒子ビーム応用装置）向けの抵抗調整低導電性アルミナジルコニア複合セラミックスを提供する。【解決手段】アルミナ、ジルコニア、酸化チタンを含む原料粉末の焼結体であって、焼結体中のジルコニア粒子中に含まれる酸化チタンの濃度がＴｉ／Ｚｒモル比で０．４〜０．８であり、チタン酸アルミニウムが１質量％以下であり、正方晶系および単斜晶系ジルコニアの含有率が１０質量％以下である、抵抗調整低導電性アルミナジルコニア複合セラミックス。【選択図】図１
RESISTANCE-ADJUSTED LOW-CONDUCTIVITY ALUMINA-ZIRCONIA COMPOSITE CERAMIC AND MANUFACTURING METHOD THEREFOR
To provide a resistance-adjusted low-conductivity alumina-zirconia composite ceramic which is a high-durability resistance-adjusted low-conductivity ceramic having heat resistance, thermal conductivity, low thermal expansion property, high strength, crystal stability, and thermal cycle stability (-50 to 400°C) in addition to electrical conductivity, and specifically for use in applying a high voltage (for example, a semiconductor manufacturing device such as an ion implantation device, or an electron/charged particle beam application device such as an electron microscope or an electric propulsion device such as an ion engine).SOLUTION: The resistance-adjusted low-conductivity alumina-zirconia composite ceramic is a sintered compact of raw material powders containing alumina, zirconia, and titanium oxide. In the sintered compact, the concentration of titanium oxide contained in zirconia particles is 0.4-0.8 in a Ti/Zr molar ratio, the content of aluminum titanate is 1 mass% or less, and the content of tetragonal and monoclinic zirconia is 10 mass% or less.SELECTED DRAWING: Figure 1
【課題】導電性以外に、耐熱性、熱伝導性、低熱膨張性、高強度、結晶安定性、熱サイクル安定性（-５０〜４００℃）を併せ持つ高耐久性の抵抗調整低導電性セラミックスである抵抗調整低導電性アルミナジルコニア複合セラミックス、特に高電圧印加する際の用途（たとえば、イオン注入装置などの半導体製造装置や、電子顕微鏡、イオンエンジンなどの電気推進機といった電子・荷電粒子ビーム応用装置）向けの抵抗調整低導電性アルミナジルコニア複合セラミックスを提供する。【解決手段】アルミナ、ジルコニア、酸化チタンを含む原料粉末の焼結体であって、焼結体中のジルコニア粒子中に含まれる酸化チタンの濃度がＴｉ／Ｚｒモル比で０．４〜０．８であり、チタン酸アルミニウムが１質量％以下であり、正方晶系および単斜晶系ジルコニアの含有率が１０質量％以下である、抵抗調整低導電性アルミナジルコニア複合セラミックス。【選択図】図１
RESISTANCE-ADJUSTED LOW-CONDUCTIVITY ALUMINA-ZIRCONIA COMPOSITE CERAMIC AND MANUFACTURING METHOD THEREFOR
抵抗調整低導電性アルミナジルコニア複合セラミックスおよびその製造方法
YOKOTA KOZO (Autor:in) / KATAOKA YOSHITAKA (Autor:in) / OZAKI YUSUKE (Autor:in) / ISHII YUSUKE (Autor:in)
19.08.2021
Patent
Elektronische Ressource
Japanisch
IPC:
C04B
Kalk
,
LIME
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